低维硅纳米结构的制备及其性能研究

发布时间：2018-01-12 14:16

本文关键词：低维硅纳米结构的制备及其性能研究　出处：《南京邮电大学》2015年硕士论文　论文类型：学位论文

【摘要】：低维Si半导体纳米材料具有很多特殊的物理和化学性质,在光电子和生物医学领域都有很大的潜在应用前景,因此,低维Si半导体纳米材料成为了科学界的研究热点。在论文中主要制备和研究了两种低维的Si纳米结构,一种是无序的Si量子,另一种是有序的Si纳米柱。论文中主要以化学腐蚀方法制备出小尺寸Si量子点,通过TEM、XRD等测试手段对其结构和形貌进行表征,TEM图像表明制备所得的Si量子点平均尺寸为1.7 nm,粒子平均密度约为7.52×1011颗/cm2,XRD测试表明以化学腐蚀方法制备出的产物主要是不同晶面的Si量子点。通过PL谱对制备所得的Si量子点进行光学性能分析,PL谱表明Si量子的水溶液在紫蓝光区域表现出强的、稳定的光致发光现象。PL分析与计算结果表明,Si量子点的可调谐蓝光发射特性可归因于量子限制效应模型。在此基础上以沉积的方法制备出纳米晶Si固体薄膜,XPS分析表明纳米晶Si固体薄膜表面的主要成分是硅元素。通过PL谱对制备所得的纳米晶Si固体薄膜进行光学性能分析,PL谱分析表明制备出的纳米晶Si固体薄膜在紫蓝光区域可调谐发光,很好的保留了Si纳米颗粒的原有属性,其发光现象也可归因于量子限制模型。同时还利用纳米胶体晶体刻蚀方法制备出有序的Si纳米柱阵列,通过SEM、AFM等测试手段对其结构和形貌进行表征,SEM和AFM图像表明制备所得的有序Si纳米柱的平均尺寸为120nm。并以此纳米Si柱为敏感层制备湿敏传感器,对湿敏传感器的性能研究表明以纳米Si柱为敏感层的湿敏传感器具有较高的灵敏度且响应和恢复时间较短。
[Abstract]:Low dimensional Si semiconductor nano materials have many special physical and chemical properties, have great potential applications in optoelectronic and biomedical fields, therefore, the low dimensional Si semiconductor nano materials has become a research hotspot in the field of science. In this paper, the main research and preparation of two kinds of low dimensional Si nanostructures, a Si is a quantum disordered, the other is a Si nano column order. This thesis mainly to chemical etching method to prepare small size Si quantum dots by TEM, the structure and morphology characterization of XRD test methods, TEM images show that the average size of Si quantum dots prepared for 1.7 nm particles the average density is about 7.52 * 1011 /cm2, XRD tests show that the chemical corrosion method for product preparation is mainly different crystal faces of Si quantum dots. The optical performance analysis based on PL spectrum of Si quantum dots on prepared, PL spectra show that Si quantum of water The solution in the violet blue light region showed strong and stable photoluminescence.PL analysis and calculation results show that the tunable blue emission can be attributed to the quantum confinement effect model of Si quantum dots. On the basis of the deposition method to prepare nanocrystalline Si thin solid films, XPS analysis showed that the major components of the surface of nano Si solid film is amorphous silicon elements. Through the analysis of optical properties of PL spectra of nanocrystalline Si films prepared on solid, PL spectral analysis showed that the nano Si solid thin film prepared by tunable luminescence in the purple blue area, very good to retain the original properties of Si nanoparticles, the luminescence phenomenon can be attributed to the quantum confinement model. Also the use of nano colloidal crystal etching method to fabricate Si nanowire arrays, ordered by SEM, the structure and morphology characterization of AFM test methods, SEM and AFM images show that the preparation The ordered Si nano column has an average size of 120nm., and a sensitive sensor based on nano Si column is used to prepare the humidity sensor. The performance of the humidity sensor shows that the humidity sensor with nano Si column as the sensitive layer has high sensitivity and short response time and recovery time.

【学位授予单位】：南京邮电大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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