靶材成分对磁控溅射PTFE超疏水薄膜的影响

发布时间：2018-01-12 21:10

本文关键词：靶材成分对磁控溅射PTFE超疏水薄膜的影响　出处：《表面技术》2017年09期 　论文类型：期刊论文

【摘要】：目的了解靶材成分对磁控溅射PTFE薄膜性能的影响,以提升PTFE薄膜疏水性能。方法采用射频磁控溅射技术,在玻璃基片上一步制备了透明超疏水聚四氟乙烯薄膜,并研究了不同PTFE靶材对薄膜的影响。利用X射线光电子能谱仪(XPS)、接触角测试仪(Drop Meter)、紫外-可见分光光度计(UV-Vis)分别对靶材和薄膜的性能进行研究。结果两靶材的氟碳官能团含量有明显差异,且靶材1含有CF2O,靶材2中不含。靶材的成分影响了PTFE的溅射率,靶材1的溅射率为靶材2的2倍。相同溅射时间下,靶材不同的薄膜厚度不同,从而表现出不同的静态水接触角。薄膜的疏水性能与薄膜厚度呈现指数关系,最终稳定在170°水接触角平台。同时,溅射过程中,F离子刻蚀到玻璃基底而引入了Na F,但薄膜中Na F和氟碳基团的含量与靶材成分相关。薄膜中Na F的存在,提升了薄膜的F/C比,降低了薄膜表面能,提升了其疏水性能,但降低了薄膜的可见光透过率。结论一步制备透明超疏水聚四氟乙烯薄膜的技术具有广泛应用前景,了解靶材成分对薄膜性能的影响具有重要指导意义。
[Abstract]:Objective to investigate the effect of target composition on the properties of PTFE films prepared by magnetron sputtering in order to improve the hydrophobic properties of PTFE films. Transparent super-hydrophobic PTFE films were prepared on glass substrates, and the effects of different PTFE targets on the films were investigated. X-ray photoelectron spectroscopy (XPS) was used. Contact angle tester drop Meter. Ultraviolet-visible spectrophotometer (UV-Vis) was used to study the properties of target and film respectively. Results the content of fluorocarbon functional groups in the two targets was significantly different and target 1 contained CF2O. The composition of target material affects the sputtering rate of PTFE, and the sputtering rate of target 1 is 2 times as high as that of target 2. At the same sputtering time, different film thickness of target is different. The hydrophobicity of the film is exponentially related to the thickness of the film, and it is stabilized in the 170 掳water contact angle platform. At the same time, during the sputtering process. F ion etched into glass substrate and introduced Na F, but the content of Na F and fluorocarbon groups in the film was related to the target composition. The presence of Na F in the film enhanced the F / C ratio of the film. The surface energy and hydrophobicity of the films were reduced, but the visible light transmittance of the films was decreased. Conclusion the technology of one-step preparation of transparent super-hydrophobic PTFE thin films has a wide application prospect. It is important to understand the effect of target composition on film properties.
【作者单位】：重庆大学材料科学与工程学院;
【基金】：国家自然科学基金项目(51377177)~~
【分类号】：TB383.2
【正文快照】： Received:2017-03-25;Revised:2017-04-25film thickness varied with target provided with the same sputtering time,thus exhibiting different static water contact angles.Film hydrophobicity exhibited an exponential relationship with film thickness,and finally

【相似文献】