电磁感应加热蒸发金属铈及蒸气密度测量

发布时间：2018-02-13 02:02

  本文关键词： 金属Ce薄膜 电磁感应加热 蒸发 蒸气密度 蒸气密度分布　出处：《稀有金属与硬质合金》2017年04期 　论文类型：期刊论文

【摘要】：通过对金属Ce蒸发行为的分析,确定了合适的蒸发温度,在此基础上开展了电磁感应蒸发装置的设计及蒸发技术研究。对金属Ce蒸发速率进行了测定,并采用膜厚法分析蒸气密度分布,称重法测量了蒸气密度。结果表明:2 000℃左右金属Ce蒸发速率约为99~135g/h,实测值略低于理论值;金属Ce原子蒸气密度分布近似为余弦函数高次幂分布,原子蒸气密度约为10~(11) atom/cm~3量级。采用电磁感应加热蒸镀金属Ce薄膜具有应用可行性。
[Abstract]:Based on the analysis of the evaporation behavior of metal ce, the suitable evaporation temperature is determined, and the design of the electromagnetic induction evaporation device and the study of evaporation technology are carried out. The evaporation rate of metal ce is measured. The vapor density distribution was analyzed by the film thickness method and the vapor density was measured by the weighing method. The results show that the evaporation rate of ce is about 99 ~ 135g / h at about 2 000 鈩，

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