基于纳米机械刻划Au纳米线电极的制备及其应用研究

发布时间：2018-02-24 01:12

本文关键词： 原子力显微镜纳米线电极纳米刻划电学性能纳结构　出处：《哈尔滨工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：金属纳米线因其具有独特的光学、电学和磁学特性,目前被广泛应用于传感器领域,在其他领域也有较大的应用空间。基于原子力显微镜(AFM)探针的纳米机械刻划是加工微纳米结构的一种重要方法,虽然可以制备出位置可控的纳米线,但是针尖在刻划过程中磨损严重,制备的纳米线尺寸不能精确控制,而且由于纳米线尺寸较小,后续制备传感器过程比较繁琐。学者对制备纳米线电极的质量和其电学性能的影响因素研究较少。因此,本课题主要研究基于纳米机械刻划与光刻技术有效制备纳米线电极的方法,并且对其电学性能进行分析,主要从以下三个方面进行具体的研究和分析。首先,对AFM探针在聚甲基丙烯酸甲酯(PMMA)上的刻划过程进行理论建模。综合考虑探针针尖的几何形状、加工过程中PMMA材料对探针的流动应力和粘性摩擦力、聚合物薄膜的厚度、材料堆积以及基底对薄膜的影响,根据力平衡条件得到一定针尖半径的探针刚好划透特定厚度的PMMA薄膜所需施加的载荷,并且通过实验对理论模型进行验证。其次,在刻划理论模型指导下进行纳米线电极的制备,详细介绍了纳米线电极的制备流程和影响因素。其中纳米线制备采用AFM探针纳米机械刻划和liftoff结合的方法,外围电路利用光刻技术结合lift-off制备,而且探究了电子束蒸发镀膜工艺中蒸发源与镀件之间的距离、电子束束流和镀膜时间对纳米线电极的质量影响。最后,利用数字源表和探针台对纳米线电极的电学性能进行测量,分别对Au和Ti两种材质的外围电路和纳米线进行电阻率测量,其中纳米线主要研究长宽高对其电学性能的影响,并与体电阻率进行分析比较。还探究了纳米线上的纳结构和表面硫醇吸附对其电学性能的影响。最后制备出单根和基于阵列的Au纳米线电极传感器件。
[Abstract]:Metal nanowires are widely used in sensor fields because of their unique optical, electrical and magnetic properties. Nanomechanical characterization based on AFM probes is an important method for fabricating microstructures, although controllable nanowires can be prepared. However, the tip of the needle is worn seriously in the process of engraving, the size of the prepared nanowires cannot be accurately controlled, and because of the smaller size of the nanowires, The process of subsequent fabrication of sensor is complicated. There are few researches on the quality and electrical properties of nanowire electrode. This paper mainly studies the methods of preparing nanowire electrode based on nano-mechanical characterization and lithography, and analyzes its electrical properties, mainly from the following three aspects of specific research and analysis. In this paper, the theoretical modeling of AFM probe on PMMA was carried out. Considering the geometry of the tip of the probe, the flow stress and viscous friction of PMMA material to the probe and the thickness of polymer film were considered. According to the force balance condition, a probe with a certain tip radius is applied to the PMMA film with a specific thickness, and the theoretical model is verified by experiments. The preparation of nanowire electrode was carried out under the guidance of theoretical model, and the preparation process and influencing factors of nanowire electrode were introduced in detail. Among them, nanowires were prepared by AFM probe nano-mechanical scribing and liftoff binding method. The peripheral circuit is fabricated by photolithography combined with lift-off, and the influence of the distance between the evaporation source and the part, the electron beam current and the coating time on the quality of nanowire electrode in the process of electron beam evaporation coating is investigated. The electrical properties of nanowire electrode were measured by digital source meter and probe table, and the electrical resistivity of the peripheral circuits and nanowires of au and Ti were measured, respectively. The influence of length, width and height on the electrical properties of nanowires was studied. The effects of nanostructure and surface mercaptan adsorption on the electrical properties of nanowires were also investigated. Finally, single and array-based au nanowire electrode sensing devices were fabricated.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.1;TP212

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