金刚石自支撑膜的高温红外透过性能

发布时间：2018-02-25 16:35

  本文关键词： 直流电弧等离子喷射 金刚石自支撑膜 高温红外透过　出处：《材料工程》2017年02期 　论文类型：期刊论文

【摘要】：由于金刚石具有低吸收和优异的力学与导热性能使其成为长波(8~12μm)红外光学窗口材料的重要选择。对于许多极端条件的应用,化学气相沉积(CVD)金刚石自支撑膜的高温光学性质至关重要。应用直流电弧等离子喷射法制备光学级金刚石自支撑膜进行变化温度的红外光学透过性能研究,采用光学显微镜、X射线衍射、激光拉曼和傅里叶变换红外-拉曼光谱仪检测CVD金刚石膜的表面形貌、结构特征和红外光学性能。结果表明:在27℃时金刚石膜长波红外8~12μm之间的平均透过率达到65.95%,在500℃时8~12μm处的平均透过率为52.5%。透过率下降可分为3个阶段。对应于透过率随温度的下降,金刚石膜的吸收系数随温度的升高而增加。金刚石自支撑膜表面状态的变化,对金刚石膜光学性能的影响显著大于内部结构的影响。
[Abstract]:Due to its low absorption and excellent mechanical and thermal conductivity, diamond has become an important choice of infrared optical window materials with long wave 810 渭 m. The high temperature optical properties of CVD diamond self-supporting films are very important. The infrared optical transmittance of optical-grade diamond self-supporting films prepared by DC arc plasma spray method is studied. The surface morphology of CVD diamond films was examined by optical microscope X-ray diffraction, laser Raman spectroscopy and Fourier transform infrared Raman spectroscopy. Structural characteristics and infrared optical properties. The results show that the average transmittance of diamond films reaches 65.95 渭 m at 27 鈩，

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