六方氮化硼表面纳米结构制备及表征研究

发布时间：2018-03-06 08:26

本文选题：六方氮化硼　切入点：石墨烯　出处：《华中科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：自2004年石墨烯被成功分离之后,一系列其它二维晶体材料神秘的面纱被慢慢地揭开,其中六方氮化硼(h-BN)是一种晶格结构、物理性质和石墨烯既相似又互补的二维层状晶体材料。如今已有很多科学家通过探索制备出石墨烯—氮化硼异质结等材料结构来研究其在微电子器件上的应用前景。本文主要通过h-BN表面纳米沟槽的刻蚀和气泡制备来研究六方氮化硼表面微纳结构的制备与表征。在h-BN表面刻蚀部分,研究了六方氮化硼表面纳米槽的刻蚀工艺及影响因素。首先,通过采用纳米颗粒作为刻蚀催化剂,在h-BN表面获得各向异性良好的直线型h-BN表面纳米沟槽,并将其设定为标准常规工艺,在此基础上分别在还原性刻蚀气氛和氧化性刻蚀氛围下,实现h-BN表面纳米沟槽的长度、深度、宽度和密度的可控刻蚀。探索了六方氮化硼表面纳米沟槽刻蚀的各种影响因素,研究了h-BN表面线刻蚀各向异性随气体压强以及刻蚀气氛浓度的改变所产生的相应变化规律。在气泡研究部分,利用化学气相沉积的管式炉在等离子体射频电源的辅助下实现了在h-BN表面制备微纳气泡结构的设想,并找到了影响气泡大小的实验参数以及变化规律。最后,借助可变温控制的样品台、光学显微镜、原子力显微镜以及拉曼光谱仪对六方氮化硼表面的微纳气泡结构随温度变化的图像以及晶格振动的频率进行表征,研究h-BN表面气泡随温度变化的规律。
[Abstract]:Since the successful separation of graphene in 2004, the mysterious veil of a series of other two-dimensional crystal materials has been slowly lifted, in which hexagonal boron nitride (h-BN) is a lattice structure. A two-dimensional layered crystal material with physical properties similar to and complementary to graphene. Nowadays, many scientists have explored the structure of graphene-boron nitride heterojunction to study its application in microelectronic devices. In this paper, we study the preparation and characterization of hexagonal boron nitride surface microstructures by etching nano-grooves on h-BN surface and bubble preparation. The etching process of hexagonal boron nitride surface nanogrooves and its influencing factors were studied. Firstly, the anisotropic nanogrooves on h-BN surface were obtained by using nano-particles as the etching catalyst. On the basis of this, the length and depth of nano-grooves on h-BN surface can be realized by reducing etching atmosphere and oxidizing etching atmosphere, respectively. Controlled etching of width and density. Various factors affecting the etching of nano-grooves on the surface of hexagonal boron nitride have been explored. The variation of the anisotropy of h-BN surface with the change of gas pressure and the concentration of etching atmosphere is studied. Using the tube furnace of chemical vapor deposition with the assistance of plasma radio frequency power source, the assumption of fabricating micro and nano bubble structure on h-BN surface is realized, and the experimental parameters affecting the bubble size and the variation law are found. With the help of a sample table controlled by variable temperature, an optical microscope, an atomic force microscope and a Raman spectrometer, the image and the frequency of lattice vibration of the micro-nano bubble structure on the surface of hexagonal boron nitride are characterized. The change of bubble temperature on h-BN surface was studied.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ128;TB383.1

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