多孔单晶氧化锌纳米片气敏传感器的制备及其性能研究

发布时间：2018-03-10 15:38

  本文选题：半导体氧化物　切入点：氧化锌　出处：《安徽工程大学》2017年硕士论文　论文类型：学位论文

【摘要】：氧化锌(ZnO)是禁带宽度为(3.4 eV)的n型半导体材料,由于成本低、化学性能稳定等,其大规模应用在气敏传感器、光电器件、光催化等领域。半导体气敏传感器由于具有寿命长、应用范围广、成本低、能耗低和制作简单等特点,已被广泛应用于易爆易燃、有害有毒气体的检测,是目前应用最广的气敏传感器之一。但是当前的ZnO气敏传感器仍然存在灵敏度较低、工作温度高、选择性差、重复性差等缺陷,这大大限制了其在国民经济建设中的应用。本课题针对以上的缺陷,合成了三维的多孔单晶ZnO纳米片,研究了金纳米颗粒(Au NPs)修饰对其气敏性能的影响;制成了紫外光激活的单片ZnO气敏传感器,探究了其性能。主要内容如下:(1)采用一步水热法结合热处理工艺合成多孔单晶ZnO纳米片(HPSCZNs),聚乙烯亚胺(PEI)修饰在HPSCZNs表面,把PEI修饰的HPSCZNs与AuNPs溶胶溶液混合,AuNPs经过静电吸引修饰到HPSCZNs表面,制成了 AuNPs修饰的HPSCZNs。通过表征证实了材料的多孔单晶片体结构以及AuNPs的修饰。探究了材料的形成机理,工作温度和不同金含量对传感器性能的影响。同时检测了传感器对三甲胺(TMA)的气敏性能,最后对气敏机理做了较深入的探讨。(2)文献报道多晶结构会致使气敏传感器稳定性变差,气敏传感器多是较高的工作温度。本文把多孔单晶ZnO纳米片材料在乙醇中超声分散,滴加到Au叉指电极上,用聚焦离子束双束系统(FIB)在ZnO与金电极之间沉积铂(Pt)层连通电极,制成了单片ZnO气敏传感器,探究了其对乙醇的气敏特性。后对紫外激活传感器的敏感机理做了深入讨论。
[Abstract]:Zinc oxide (ZnO) is an n-type semiconductor material with a bandgap of 3.4eV). Because of its low cost and stable chemical properties, it is widely used in gas sensors, optoelectronic devices, photocatalysis and other fields. It has been widely used in the detection of flammable, flammable and noxious gases due to its wide range of applications, low cost, low energy consumption and simple fabrication. It is one of the most widely used gas sensors at present. However, the current ZnO gas sensors still have some shortcomings, such as low sensitivity, high working temperature, poor selectivity, poor repeatability, etc. This has greatly limited its application in national economic construction. In view of the above defects, the three-dimensional porous single crystal ZnO nanocrystals were synthesized, and the effect of au / au modification on their gas-sensing properties was studied. A monolithic ZnO gas sensor activated by ultraviolet light was fabricated and its properties were investigated. The main contents are as follows: 1) the porous ZnO nanocrystalline ZnO films were synthesized by one step hydrothermal method combined with heat treatment, and modified on the surface of HPSCZNs. HPSCZNs modified by PEI was mixed with AuNPs sol solution and modified to HPSCZNs surface by electrostatic attraction. HPSCZNs modified by AuNPs were prepared. The structure of porous single crystal chips and the modification of AuNPs were confirmed by characterization. The formation mechanism of the material was investigated. The effects of working temperature and different gold content on the performance of the sensor were also studied. At the same time, the gas sensing performance of the sensor to trimethylamine (TMA) was tested. Finally, the gas sensing mechanism was discussed in depth, and it was reported in the literature that the polycrystalline structure would result in the deterioration of the stability of the gas sensor. In this paper, the porous monocrystalline ZnO nanocrystalline materials were dispersed in ethanol and dripped onto the au interDigital electrode, and the Pt-connected electrode was deposited between the ZnO and the gold electrode by focusing ion beam double beam system. A single ZnO gas sensor was fabricated and its gas sensitivity to ethanol was investigated. The sensitive mechanism of UV activated sensor was discussed in detail.
【学位授予单位】：安徽工程大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.1;TP212

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