面向红外光源的辐射自增强非晶碳薄膜性能

发布时间：2018-03-12 06:52

  本文选题：非晶碳　切入点：红外光源　出处：《微纳电子技术》2017年06期 　论文类型：期刊论文

【摘要】：为进一步提升红外气体传感器的性能,提出了一种可实现辐射自增强的多层纳米交叠复合非晶碳薄膜材料应用于红外光源,对材料制备的关键工艺及性能表征进行了深入研究,以期大幅提高光源的辐射效率,降低功耗。采用非平衡磁控溅射工艺制备了含钛的周期性非晶碳复合薄膜,在不同退火条件下进行了方阻及光学吸收率测试表征。结果表明,多层纳米厚度交叠薄膜有效降低了薄膜的应力;氧等离子体表面刻蚀调控工艺实现了高辐射率纳米纤维材料的集成制备;制备的非晶碳纳米复合薄膜在高温800℃退火后呈现出良好的电阻热稳定性,在波长5~6μm内吸收率大于80%,最高接近84%。本工作为该辐射自增强的非晶碳薄膜应用于MEMS红外光源提供了一定的技术支持。
[Abstract]:In order to further improve the performance of infrared gas sensor, a multi-layer nanocomposite amorphous carbon film material which can realize self-enhancement of radiation was proposed for infrared light source. The key technology and performance characterization of the material were studied. In order to improve the radiation efficiency of the light source and reduce the power consumption, the periodic amorphous carbon composite thin films containing titanium were prepared by unbalanced magnetron sputtering, and the square resistance and optical absorptivity were measured and characterized under different annealing conditions. The multi-layer nano-thickness overlapped film can effectively reduce the stress of the film, and the surface etching control technology of oxygen plasma can realize the integrated preparation of high emissivity nano-fiber material. The amorphous carbon nanocomposite films showed good thermal resistance after annealing at 800 鈩，

本文编号：1600433