基于微波透射法的金属薄膜方块电阻测量理论及其应用

发布时间：2018-03-25 06:00

本文选题：矩形波导　切入点：金属纳米薄膜　出处：《物理学报》2017年20期

【摘要】：依据矩形波导基模的场分布表达式和电磁边界条件,解析推导了插入金属薄膜后的矩形波导透射系数,建立了考虑介质衬底影响的金属纳米薄膜微波透射系数仿真计算方法及其方块电阻的微波测量方法.运用全波电磁仿真方法对金属纳米薄膜方块电阻的微波测量装置进行了仿真验证,结果表明透射系数幅度与方块电阻的对数之间呈线性关系.采用磁控溅射工艺分别在高阻硅和玻璃两种介质衬底表面制备了不同方块电阻值的银薄膜,并测量其微波透射系数.实测结果表明,提出的方法适用于方块电阻阻值为0.05—0.5?/square的金属薄膜.研究结果对于微纳制造领域的导电薄膜方块电阻表征具有参考价值.
[Abstract]:Based on the field distribution expression and electromagnetic boundary conditions of the fundamental mode of rectangular waveguide, the transmission coefficient of rectangular waveguide inserted into metal film is derived analytically. A simulation method of microwave transmission coefficient of metal nanocrystalline films considering the influence of dielectric substrates and a microwave measurement method of square resistance are established. Microwave measurement of metal nanocrystalline film resistance by full wave electromagnetic simulation method. The device is verified by simulation. The results show that there is a linear relationship between the amplitude of transmission coefficient and the logarithm of the square resistance. Silver films with different square resistance values were prepared on high resistance silicon and glass substrates by magnetron sputtering. The microwave transmission coefficient was measured. The measured results show that the proposed method is suitable for square resistance values ranging from 0.05 to 0.5? The results can be used to characterize the square resistance of conductive films in the field of micro and nano fabrication.
【作者单位】：西安交通大学微电子学院;
【基金】：国家自然科学基金(批准号:61501364)资助的课题~~
【分类号】：TB383.2;TM934.1

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