化学水浴法制备ZnS薄膜的结构与性能

发布时间：2018-03-25 20:17

本文选题：硫化锌　切入点：化学水浴法　出处：《中山大学学报(自然科学版)》2017年03期

【摘要】：采用化学水浴法制备了ZnS薄膜,并从沉积ZnS薄膜的化学反应原理出发,对其结构和性能进行了综合研究。结果表明:随着沉积时间的增加,ZnS薄膜厚度增加,其光学透过率降低,薄膜的禁带宽度也随之变小,最小值为3.74 e V;而薄膜的粗糙度变化不大,其值在6~9 nm之间。随着反应物浓度的增加,薄膜的光学透过率呈先增加后减小的变化,当反应物浓度过低或过高时,沉积反应都会向同质反应偏移,在薄膜表面生成杂质,导致薄膜不均匀。当沉积时间为120 min,ZnSO_4、SC(NH_2)_2和NH_3·H_2O的浓度分别为0.03、0.4和4.0 mol/L时,沉积的ZnS薄膜呈均匀致密结构,成分为单一ZnS相,其光学透过率在450~900 nm波段高于70%。
[Abstract]:ZnS thin films were prepared by chemical bath method. The structure and properties of ZnS thin films were studied based on the chemical reaction principle. The results show that the optical transmittance decreases with the increase of deposition time. With the increase of reactant concentration, the optical transmittance of the films increases first and then decreases with the increase of the concentration of reactants, and the minimum band gap is 3.74 EV, while the roughness of the films is not changed much, with the increase of reactant concentration, the roughness of the films is between 6 nm and 9 nm, and the optical transmittance of the films increases firstly and then decreases. When the concentration of reactants is too low or too high, the deposition reaction will shift to the homogeneous reaction, resulting in the formation of impurities on the surface of the film, resulting in the film being uneven. When the deposition time is 120 mins, the concentration of ZnSO4SCSO4SCSS-STAN-2 and NH_3 H2O is 0.03n0.4,4.0 mol/L, respectively. The deposited ZnS thin films have homogeneous dense structure and single ZnS phase, and their optical transmittance is higher than 70nm at 450 nm.
【作者单位】：青海民族大学物理与电子信息科学学院;中山大学物理学院∥广东省光伏技术重点实验室;
【基金】：青海省应用基础研究计划资助项目(2014-ZJ-725) 广东省教育厅资助项目(2013CXZDA002)
【分类号】：TB383.2;TM914.4

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