锂离子固体电解质薄膜的制备和性能研究

发布时间：2018-05-18 15:33

  本文选题：固体电解质 + LLTO薄膜　； 参考：《合肥工业大学》2015年硕士论文

【摘要】：锂离子固体电解质薄膜具有化学稳定性高,安全性能强等优点,在电致变色器件、电化学传感器、锂离子电池中具有广泛的应用。钛酸镧锂(LLTO)和锂磷氧氮(LiPON)薄膜具有较高的锂离子电导率以及良好的电化学稳定性,已成为当前应用最为广泛的锂离子固体电解质薄膜。采用TiO2以及La203粉末烧结制备La0.56L10.33TiO3陶瓷靶材。用射频磁控溅射法在ITO玻璃和Si片衬底上制备LLTO薄膜,氧氩比为10sccm:25sccm,工作气压为1.5Pa,功率为100W。研究了不同退火温度对LLTO薄膜组织形貌、离子电导率以及光电性能的影响。在室温下制备的LLTO薄膜为非晶态,随着退火温度的升高,薄膜的离子电导率和可见光透过率都随之升高,经300℃氩气气氛退火后,薄膜的离子电导率为5.0×10-6Scm-1,可见光平均透过率为89%。采用Li3PO4粉末烧结制备Li3PO4陶瓷靶材。.通过射频反应磁控溅射法在ITO玻璃衬底上制备LiPON薄膜。详细研究了LiPON薄膜制备过程中溅射气压、溅射功率、氮气流量对薄膜沉积速率的影响。薄膜的最佳沉积速率工艺为：溅射气压为1.5Pa,射频溅射功率为120W,氮气流量为30sccm。研究了溅射功率对薄膜表面形貌及离子电导率的影响。随着溅射功率的增加,薄膜的离子电导率随之升高,在功率为120W时,薄膜的离子电导率为6.1×10-7Scm-1。用LLTO、LiPON单层薄膜、LLTO/LiPON/LLTO三层薄膜作为固体电解质,分别制备了单基片式电致变色器件,并对器件的电致变色性能进行了测试分析。
[Abstract]:Lithium ion solid electrolyte thin films have been widely used in electrochromic devices, electrochemical sensors and lithium-ion batteries because of their high chemical stability and strong safety. Lanthanum titanate (LLTOO) and lithium-phosphate nitride (LiPON) thin films have high lithium ion conductivity and good electrochemical stability and have become the most widely used lithium ion solid electrolyte films. TiO2 and La203 powders were sintered to prepare La0.56L10.33TiO3 ceramic targets. LLTO thin films were prepared on ITO glass and Si substrates by RF magnetron sputtering. The ratio of oxygen to argon is 10sccm: 25sccm, the working pressure is 1.5Paand the power is 100W. The effects of annealing temperature on the microstructure, ionic conductivity and photoelectric properties of LLTO films were investigated. The LLTO films prepared at room temperature are amorphous, and the ionic conductivity and visible light transmittance of the films increase with the increase of annealing temperature. After annealing in argon atmosphere at 300 鈩，

本文编号：1906399