氧化钒超材料的设计、仿真及制备研究

发布时间：2018-06-02 18:26

本文选题：电磁超材料 + 氧化钒　；参考：《电子科技大学》2016年硕士论文

【摘要】：太赫兹波具有低光子能量、高透射、低损耗等特殊性质,使其被广泛地应用于无损检测、成像、通信等领域。由于自然界中缺少可以对太赫兹波产生响应的材料,严重地阻碍了太赫兹波的开发和利用。超材料作为一种新兴的人工合成材料,可以通过合理地设计其单元结构及形状尺寸等因素,使其对特定频率的电磁波产生响应。因此,超材料的出现给太赫兹波的研究带来了新的机遇。氧化钒是一种性能良好的红外探测材料,如何将其应用到超材料中,制备出氧化钒超材料是本论文主要的研究内容。此外,本论文还对超材料响应的调控、溶胶-凝胶法制备氧化钒的工艺优化、氧化钒超材料的设计仿真等进行了研究。具体的研究内容包括:(1)结合前人的研究,本论文提出了调节超材料太赫兹响应的一种新方法,即在超材料的中间介质层引入一附加金属条,调节该金属条的位置和线宽。仿真结果显示,在附加金属条向顶层金属环移动的过程中,超材料的响应频率红移。当金属条位于介质的中间位置时,超材料的吸收峰值达到最大(99.98%)。在附加金属条线宽增加的过程中,超材料的响应频率亦发生红移,且吸收峰值增大。采用该方法,可以对超材料的太赫兹响应进行有效的调控。(2)通过优化溶胶-凝胶法制备氧化钒薄膜的工艺条件,制备适用于超材料介电层的氧化钒薄膜。经过重复制膜工艺的方法,可以明显地提高氧化钒薄膜的厚度。采用此方法制备用作超材料介电层的氧化钒薄膜,可实现氧化钒超材料对入射电磁波的响应吸收。(3)对所设计的氧化钒超材料进行仿真,发现随着超材料介电层氧化钒薄膜厚度的增加,超材料对入射电磁波的吸收增强。当氧化钒薄膜的厚度从137nm增加到296nm时,超材料对入射电磁波的吸收率从20.90%增大到了41.16%。(4)利用微加工技术,制备出本论文氧化钒超材料的图形掩膜。在此基础上,成功地制备出氧化钒超材料。分别对介电层为经过1次、2次、3次工艺所制备的氧化钒薄膜的超材料进行太赫兹时域光谱(THz-TDS)测试,测试结果表明所制作的氧化钒超材料的吸收频率分别为0.65THz、0.70THz、1.11THz,与仿真所得的氧化钒超材料的结果基本吻合。
[Abstract]:Terahertz wave has many special properties, such as low photon energy, high transmission and low loss, so it is widely used in nondestructive testing, imaging, communication and other fields. The development and utilization of terahertz waves are seriously hindered due to the lack of materials that can respond to terahertz waves in nature. As a new synthetic material, metamaterials can respond to electromagnetic waves at specific frequencies by reasonably designing their element structure and shape and size. Therefore, the emergence of metamaterials brings new opportunities for the study of terahertz waves. Vanadium oxide is a kind of infrared detection material with good properties. How to apply it to supermaterial and prepare vanadium oxide supermaterial is the main research content in this paper. In addition, the control of the supermaterial response, the process optimization of the preparation of vanadium oxide by sol-gel method, and the design simulation of vanadium oxide supermaterial were also studied in this paper. In this paper, a new method of adjusting the terahertz response of metamaterials is proposed, that is, an additional metal strip is introduced into the intermediate layer of the metamaterial to adjust the position and linewidth of the metal strip. The simulation results show that the response frequency of the supermaterial is red-shifted as the additional metal strip moves to the top metal ring. When the metal strip is in the middle of the medium, the absorption peak of the metamaterial reaches the maximum value of 99.98%. In the process of increasing the linewidth of the additional metal strip, the response frequency of the supermaterial is also red-shifted and the absorption peak value increases. By using this method, the terahertz response of supermaterials can be effectively regulated. 2) Vanadium oxide thin films suitable for dielectric layer of supermaterials can be prepared by optimizing the process conditions of preparation of vanadium oxide thin films by sol-gel method. The thickness of vanadium oxide film can be obviously increased by reduplicating the film. The vanadium oxide thin film used as dielectric layer of supermaterial can be prepared by this method. The response absorption of vanadium oxide supermaterial to incident electromagnetic wave can be realized by simulating the designed vanadium oxide supermaterial. It is found that the absorption of incident electromagnetic waves increases with the increase of the thickness of vanadium oxide thin films. When the thickness of vanadium oxide film increases from 137nm to 296nm, the absorptivity of incident electromagnetic wave increases from 20.90% to 41.16%. On this basis, vanadium oxide supermaterial was successfully prepared. The terahertz time domain spectroscopy (THz TDSs) was used to measure the dielectric layer of vanadium oxide thin films prepared by one or two or three processes. The results show that the absorption frequency of the vanadium oxide supermaterial is 0.65 THzN 0.70 THzN 1.11THz. the results are in good agreement with the simulated results.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TB33

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