基于类金刚石碳的金属复合薄膜的制备及其力学性能研究

发布时间：2018-06-06 00:34

本文选题：类金刚石薄膜 + 金属掺杂　；参考：《南京理工大学》2015年硕士论文

【摘要】：类金刚石(DLC)薄膜是含有金刚石结构(sp3)的非晶碳膜,它具有许多与金刚石薄膜类似的性能。但是,膜层的内应力过大,严重限制了薄膜的实际应用。因此,本课题采用金属掺杂或引入过渡层的方法制备基于DLC的金属复合薄膜,研究其结构、形貌及力学性能的变化。采用脉冲阴极电弧蒸发法制备DLC薄膜。结果表明,脉冲频率的变化可以显著改变DLC薄膜中碳sp2团簇的尺寸和有序度等微结构,从而导致薄膜中sp3/sp2相对比例的变化。随着脉冲频率的增加,薄膜的表面粗糙度降低,而硬度和内应力增加。此外,DLC薄膜在可见光区域具有比较高的透光率,随着脉冲频率的增加,薄膜的透光率显著降低。通过直流磁分离和脉冲阴极电弧双激发源等离子体方法制备高含量Ti(或Cu)合金化DLC薄膜。结果表明,Ti合金化DLC薄膜中含有硬质相TiC,而Cu原子不与C原子形成化学键。退火处理前,随着薄膜中金属含量的增加,两种合金化薄膜的硬度都降低,Ti掺杂的DLC膜内应力基本不变,而Cu合金化DLC膜内应力急剧下降。退火处理后,两种薄膜的内应力均减小5倍以上。采用双激发源阴极电弧蒸发法制备具有不同相对厚度的纳米级的Cr/DLC双层膜。结果表明,随着Cr夹层和碳层厚度的变化,Cr/DLC双层膜中碳sp2团簇的尺寸和有序度会受到相应影响。保持碳层的厚度为80nm,当Cr夹层的厚度达到12-20nm时,双层膜的硬度最大。随着Cr夹层厚度的增加,双层膜的内应力降低,当Cr夹层厚度超过45nm时,膜内应力不变。对于Cr夹层厚度为20nm的双层膜来说,当碳层的厚度超过65～106 nm时,Cr夹层的存在不会对Cr/DLC双层膜的微结构造成影响。此外,Cr夹层的引入可以在一定程度上减小薄膜的摩擦系数和增加薄膜在可见光区域的透过率。
[Abstract]:Diamond-like carbon (DLC) films are amorphous carbon films with diamond structure (sp3), which have many properties similar to those of diamond films. However, the internal stress of the film is too large, which seriously limits the practical application of the film. Therefore, metal composite thin films based on DLC were prepared by metal doping or transition layer, and the changes of structure, morphology and mechanical properties were studied. DLC thin films were prepared by pulsed cathode arc evaporation. The results show that the change of pulse frequency can significantly change the size and order of carbon sp2 clusters in DLC films, which leads to the change of the relative proportion of sp3/sp2 in the films. With the increase of pulse frequency, the surface roughness of the film decreases, while the hardness and internal stress increase. In addition, DLC films have high transmittance in the visible region, and the transmittance decreases with the increase of pulse frequency. High content Ti (or Cu) alloyed DLC thin films were prepared by DC magnetic separation and pulsed cathode arc double excitation source plasma. The results show that Ti alloyed DLC films contain hard phase tic, while Cu atoms do not form chemical bonds with C atoms. Before annealing, with the increase of metal content in the films, the hardness of the two kinds of alloyed films decrease the stress of Ti doped DLC films almost unchanged, while the stresses of Cu alloyed DLC films decrease sharply. After annealing, the internal stresses of both films were reduced by more than 5 times. Nano-scale Cr/DLC bilayer films with different relative thickness were prepared by double excitation source cathodic arc evaporation method. The results show that the size and order of carbon sp2 clusters in Cr / DLC bilayer films are affected with the change of Cr intercalation and carbon layer thickness. The thickness of carbon layer is kept at 80 nm. When the thickness of Cr interlayer reaches 12-20nm, the hardness of bilayer film is the highest. With the increase of Cr interlayer thickness, the internal stress of the bilayer film decreases. When the Cr interlayer thickness exceeds 45nm, the inner stress of the bilayer film remains unchanged. For the bilayer film with Cr interlayer thickness of 20nm, when the thickness of carbon layer is more than 65 ~ 106nm, the existence of Cr interlayer will not affect the microstructure of Cr/DLC bilayer film. In addition, the introduction of Cr interlayer can reduce the friction coefficient of the film and increase the transmittance of the film in the visible region to a certain extent.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2

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