铝掺杂氧化锌透明分散体及导电薄膜的制备和性能研究

发布时间：2018-06-14 21:53

  本文选题：铝掺杂氧化锌 + 表面改性　； 参考：《北京化工大学》2015年硕士论文

【摘要】：在太阳能电池和平板显示行业高速发展的今天,透明导电氧化物(TCO)的作用越来越重要。绝大部分实际生产中应用的TCO为铟掺杂氧化锡(ITO),然而ITO具有毒性,且等离子环境下稳定性差；氧化锌具有良好的光学性质,通过掺杂Al元素后得到的铝掺杂氧化锌(AZO)在导电性方面得到很大提升,同时其原料廉价、无毒性以及在等离子环境下稳定。论文分别采用溶解热和共沉淀法制备了AZO纳米颗粒水相及有机相透明分散体,并利用分散体涂覆制备了透明导电薄膜,研究了制备工艺条件对AZO分散体和薄膜性能的影响。主要结论如下：1.采用溶剂热法制备了AZO纳米颗粒,考察了制备工艺条件对AZO微观结构及电阻率的影响,得到适宜的制备条件为：掺杂比为3%,沉淀剂选用氢氧化钠,反应所用溶剂为乙二醇甲醚,溶剂热温度为220℃；制备出的AZO颗粒约35 nm,电阻率为3.28×103Ω·cm；将粉体在氢氮混合气气氛中于550℃煅烧2小时后,电阻率降至20 Ω·cm。2.采用溶剂热法制备了AZO水相透明分散体,考察了制备工艺条件对AZO微观结构、分散性和电阻率等影响,得到适宜的制备条件为：掺杂比3%,溶剂选用甲醇,反应温度为70℃,改性温度为80℃,溶剂热温度为150℃,改性pH值为9,改性剂加入量为19 wt%,改性时间为3 h；制备的AZO颗粒为6-10 nm,固含量为10 wt%的水相分散体在550 nm处透过率为78.7%。3.采用共沉淀法制备了AZO有机相透明分散体,考察了制备工艺条件对AZO微观结构及分散性等影响,得到适宜的制备条件为：改性剂用量为15wt%,改性时pH值为7.5；制备的AZO颗粒为6-10 nm,固含量为10 wt%的乙二醇甲醚相分散体在550 nm处透过率为87.2%。4.利用AZO水相和有机相分散体,通过旋涂法制备了AZO透明导电薄膜,初步研究了基底处理方式、薄膜处理方式、分散介质对AZO薄膜平整度及方块电阻的影响。利用乙二醇甲醚相分散体旋涂制备的AZO薄膜于紫外环境下照射后,在550 nm处透过率为93.4%,方块电阻为2×106Ω/□。
[Abstract]:With the rapid development of solar cell and flat panel display industry, the role of transparent conductive oxide (TCO) is becoming more and more important. Most of the TCO used in practical production is indium doped tin oxide (ITO), but ITO is toxic and has poor stability in plasma environment, and zinc oxide has good optical properties. Aluminum-doped zinc oxide (AZO) obtained by doping Al elements has been greatly improved in electrical conductivity, and its raw materials are cheap, non-toxic and stable in plasma environment. In this paper, aqueous and organic transparent dispersion of AZO nanoparticles were prepared by solution heat and coprecipitation methods, and transparent conductive films were prepared by dispersion coating. The effects of preparation conditions on the properties of AZO dispersions and films were studied. The main conclusions are as follows: 1. AZO nanoparticles were prepared by solvothermal method. The effects of preparation conditions on the microstructure and resistivity of AZO were investigated. The optimum preparation conditions were as follows: doping ratio was 3 / 3, sodium hydroxide was used as precipitant, and the solvent for the reaction was ethylene glycol methyl ether. The solvothermal temperature is 220 鈩，

本文编号：2019074