锌基合金薄膜的溅射沉积及真空热蒸发研究

发布时间：2018-07-07 10:01

  本文选题：溅射 + 马赛克靶　； 参考：《沈阳航空航天大学》2015年硕士论文

【摘要】：多孔材料由于其优异的物理和力学性能现已成为一类广为使用而又具有巨大应用潜力的功能材料。本文基于Zn元素与许多元素在蒸发上的显著差异，研究了ZnSi和ZnNi合金薄膜的制备、真空脱Zn及薄膜的润湿性，得到以下研究结果： 采用射频磁控溅射沉积ZnSi和ZnNi合金薄膜，分析了马赛克靶成分与薄膜成分产生差异的原因，并且研究了基片温度和含锌量对薄膜表面形貌的影响。研究结果表明：马赛克靶中Zn:Si面积比在1:3-7:3时，可获得含Zn量在47%-82%的ZnSi合金薄膜；马赛克靶中Zn:Ni面积比在3:17-7:3时,溅射沉积的ZnNi合金薄膜含Zn量为21%-74%。通过分析实验数据获得了靶材料面积比与薄膜成分含量的经验公式，依据该公式，可以通过调节马赛克靶中材料面积比，来获得不同成分含量的薄膜。 控制基片温度为30℃-200℃，随着基片温度的增加，ZnSi薄膜晶粒尺寸变大，表面致密，但在200℃下由于晶粒生长过大导致薄膜表面粗糙；随着薄膜含锌量的增加，在ZnSi薄膜表面出现球状晶粒，并且使薄膜表面粗糙度增加。基片温度或是含锌量的变化均对ZnNi薄膜表面形貌影响不大。 经过600℃、60min、真空度为410-3Pa的真空热蒸发之后，ZnSi薄膜和ZnNi薄膜中的Zn元素绝大部分已被除去，可以获得多孔结构的Si薄膜和Ni薄膜。随着薄膜中锌含量的增加，热蒸发后Si薄膜和Ni薄膜表面孔隙率增加。提高热蒸发温度，热蒸发后薄膜的微孔尺寸增大。 本课题还研究了汞和蒸馏水分别在薄膜表面上的润湿行为。结果表明：热蒸发前，随着薄膜表面粗糙度增加，薄膜表面疏水性增强。热蒸发后，两种薄膜表面粗糙度均有较大增加，这令它们的表面疏水性更强。但薄膜表面粗糙度对汞滴在这两种薄膜表面的润湿性影响很小。
[Abstract]:Porous materials have been widely used and have great potential for application because of their excellent physical and mechanical properties. Based on the significant differences between Zn and many elements in evaporation, the preparation of ZnSi and ZnNi alloy films, the vacuum deZn removal and the wettability of ZnSi and ZnNi alloy films were studied. The results are as follows: ZnSi and ZnNi alloy films were deposited by RF magnetron sputtering. The effects of substrate temperature and zinc content on the surface morphology of the films were also investigated. The results show that when the area ratio of Zn: Si in mosaic target is 1: 3-7: 3, ZnSi alloy films with Zn content of 47-2% and Zn: Ni area ratio of 3: 17-7: 3 in mosaic target can be obtained. The empirical formula of the ratio of target material area to the composition of film is obtained by analyzing the experimental data. According to this formula, the film with different composition can be obtained by adjusting the ratio of material area in mosaic target. Controlling substrate temperature from 30 鈩，

本文编号：2104612