开放式光谱椭偏实验教学中的科研训练
发布时间：2018-07-20 17:58
【摘要】：椭偏法在材料的光学性质和薄膜厚度检测中发挥着重要的作用,椭偏测量也已纳入很多高校的实验教学内容。针对实验教学中原理展示性不足、与科研实际结合不紧密的问题,对课程形式和内容进行了改变。制作了光谱椭偏仪器件装配和动态测量视频,增加椭偏测量教学中的原理展示性,加强理论贯通性,联系科研实际,增加实验内容,通过对不同类型样品的测量分析讨论,培养学生解决实际问题的能力和创造性思维。
[Abstract]:Ellipsometry plays an important role in measuring the optical properties of materials and the thickness of films. Ellipsometry has also been included in the experimental teaching contents of many colleges and universities. In order to solve the problem that the principle is not sufficiently demonstrated in experimental teaching and is not closely combined with the practice of scientific research, the course form and content are changed. The assembly and dynamic measurement video of spectroscopic ellipsometry parts are made, the principle demonstration in ellipsometry teaching is increased, the theoretical penetration is strengthened, the scientific research practice is combined, the experimental content is added, and the measurement and analysis of different kinds of samples are discussed. Cultivate students' ability to solve practical problems and creative thinking.
【作者单位】： 大连理工大学机械工程学院;
【基金】：中国学位与研究生教育研究课题(B1-2015Y0504-029) 大连理工大学教改基金项目(JG2016026,ZD2016008) 辽宁重大装备制造协同创新中心研究生校内实践基地建设基金项目
【分类号】：G642;TB302-4
本文编号：2134307
[Abstract]:Ellipsometry plays an important role in measuring the optical properties of materials and the thickness of films. Ellipsometry has also been included in the experimental teaching contents of many colleges and universities. In order to solve the problem that the principle is not sufficiently demonstrated in experimental teaching and is not closely combined with the practice of scientific research, the course form and content are changed. The assembly and dynamic measurement video of spectroscopic ellipsometry parts are made, the principle demonstration in ellipsometry teaching is increased, the theoretical penetration is strengthened, the scientific research practice is combined, the experimental content is added, and the measurement and analysis of different kinds of samples are discussed. Cultivate students' ability to solve practical problems and creative thinking.
【作者单位】： 大连理工大学机械工程学院;
【基金】：中国学位与研究生教育研究课题(B1-2015Y0504-029) 大连理工大学教改基金项目(JG2016026,ZD2016008) 辽宁重大装备制造协同创新中心研究生校内实践基地建设基金项目
【分类号】：G642;TB302-4
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