利用超热氢交联技术提高聚氯代对二甲苯膜水汽阻隔性能研究
发布时间：2018-07-31 11:50
【摘要】：Parylene C膜(聚氯代对二甲苯,简称PC膜)具有优异的防潮、防霉、防腐、防烟雾以及电绝缘、物理机械、光学和生物相容等特性,广泛应用于半导体、传感器、微电子器件和材料防潮保护等领域。然而,在对透湿性能要求更高的应用场合,PC膜还是难以满足要求,需要进行改性或复合其它涂层,以提高其对水蒸汽的阻隔性能。但是,由于PC膜的表面能低,很难在其表面涂覆附着力优异的无机阻隔材料,而现有的表面改性法,如化学表面氧化、等离子体处理、紫外辐照等方法可以用来提高PC膜的表面能,但都会不同程度地损伤PC膜,影响其原有的优异综合性能。因此非常有必要寻找新的、无损的表面改性方法,提高复合涂层材料在PC膜表面的附着力。本研究结合Parylene C膜独特的分子结构特征,采用一种新型的表面改性技术,即超热氢交联技术(Hyperthermal Hydrogen Induced Cross-linking,HHIC)对PC膜表面进行改性,以期提高PC膜的水汽阻隔性能和与其它涂层的附着力。HHIC技术是利用系统内部的质子和氢气碰撞产生具有适当能量的氢分子(能量大于10 eV的氢分子称为超热氢分子),当超热氢碰撞有机材料表面时可以选择性地断裂碳氢键而不破坏其它化学键,产生的碳自由基同时相互偶合实现分子链交联。由于这种方法使用的氢分子能量可控,可以有效地保留所需的官能团,且不会对有机薄膜产生物理性破坏,是一种环境友好的、温和的表面改性方法。我们利用这种方法对PC薄膜进行表面改性,主要结果如下:(1)利用超热氢对PC膜进行表面处理,可以实现PC膜表面分子链的交联,使薄膜的水蒸汽透过率从原来的0.48 g/(m2·day)下降到0.12 g/(m2·day);而PC膜原有的透光性和机械强度没有受到影响;(2)利用HHIC技术可将极性聚丙烯酸(PAA)分子接枝到PC膜表面分子链上,使PC膜表面润湿性得到改善(水接触角从初始的84°下降到23°);(3)为了更进一步提高PC膜的水汽阻隔性能,利用等离子体增强化学气相沉积法(PECVD)分别在PC和PC/PAA膜表面沉积了厚度为150 nm的SiO2涂层,水蒸汽透过率测试表明,SiO2涂层的引入可以大幅度提高薄膜的水汽阻隔性能,水蒸汽透过率从0.48 g/(m2·day)下降到0.01 g/(m2·day);同时,PC膜表面PAA的接枝显著地提高PC与SiO2的结合力。
[Abstract]:Parylene C film (polychlorinated p-xylene, called PC film) has excellent moisture proof, mildew proof, anti-corrosion, smoke proof and electrical insulation, physical and mechanical, optical and biocompatible properties, and is widely used in semiconductors, sensors, microelectronic devices and material protection and other fields. However, the PC film is still in the application of higher moisture permeability. It is difficult to meet the requirements and need to be modified or compound other coatings to improve their resistance to water vapor. However, because the surface energy of the PC film is low, it is difficult to coat the inorganic barrier materials with excellent adhesion on its surface, and the existing surface modification methods, such as chemical surface oxidation, plasma treatment, ultraviolet radiation and so on, can be used to extract the material. The surface energy of the high PC film can damage the PC film to varying degrees and affect its original excellent comprehensive properties. Therefore, it is very necessary to find new, nondestructive surface modification methods to improve the adhesion of the composite coating on the surface of the PC film. This study combines the unique sub structure characteristics of the Parylene C film and uses a new surface modification technique. Hyperthermal Hydrogen Induced Cross-linking (HHIC) is used to modify the surface of the PC membrane to improve the water vapor barrier property of the PC film and the adhesion of the other coatings to the other coatings..HHIC technology is a hydrogen molecule with the energy greater than 10 eV (the hydrogen molecule greater than 10 eV). For the SUPERTHERMAL hydrogen molecule, the hydrogen bonds can be selectively broken when the SUPERTHERMAL hydrogen collide on the surface of the organic material and does not destroy other chemical bonds. The carbon free radicals produced by the molecules are simultaneously coupled to realize the molecular chain crosslinking. Biological reason destruction is an environmentally friendly, mild surface modification method. We use this method to modify the surface of PC film. The main results are as follows: (1) the surface treatment of PC membrane by super hot hydrogen can achieve the cross-linking of the molecular chain on the surface of the PC membrane, and the water vapor transmission rate of thin films descends from the original 0.48 g/ (m2. Day) to the surface. 0.12 g/ (M2 day), and the original transmittance and mechanical strength of the PC film have not been affected; (2) the use of HHIC technology can graft polar polyacrylic acid (PAA) molecules on the surface of the membrane of the PC membrane to improve the wettability of the surface of the PC film (the water contact angle decreases from the initial 84 degrees to 23 degrees). (3) in order to further improve the water vapor barrier property of the PC membrane, A SiO2 coating with a thickness of 150 nm was deposited on the surface of PC and PC/PAA films by plasma enhanced chemical vapor deposition (PECVD). The water vapor permeability test showed that the water vapor barrier property of the film could be greatly improved by the introduction of SiO2 coating, and the water vapor transmission rate decreased from 0.48 g / m2. Day to 0.01 g/ (M2 day). The grafting of PAA significantly improves the binding force between PC and SiO2.
【学位授予单位】：西南科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2;O631
本文编号：2155498
[Abstract]:Parylene C film (polychlorinated p-xylene, called PC film) has excellent moisture proof, mildew proof, anti-corrosion, smoke proof and electrical insulation, physical and mechanical, optical and biocompatible properties, and is widely used in semiconductors, sensors, microelectronic devices and material protection and other fields. However, the PC film is still in the application of higher moisture permeability. It is difficult to meet the requirements and need to be modified or compound other coatings to improve their resistance to water vapor. However, because the surface energy of the PC film is low, it is difficult to coat the inorganic barrier materials with excellent adhesion on its surface, and the existing surface modification methods, such as chemical surface oxidation, plasma treatment, ultraviolet radiation and so on, can be used to extract the material. The surface energy of the high PC film can damage the PC film to varying degrees and affect its original excellent comprehensive properties. Therefore, it is very necessary to find new, nondestructive surface modification methods to improve the adhesion of the composite coating on the surface of the PC film. This study combines the unique sub structure characteristics of the Parylene C film and uses a new surface modification technique. Hyperthermal Hydrogen Induced Cross-linking (HHIC) is used to modify the surface of the PC membrane to improve the water vapor barrier property of the PC film and the adhesion of the other coatings to the other coatings..HHIC technology is a hydrogen molecule with the energy greater than 10 eV (the hydrogen molecule greater than 10 eV). For the SUPERTHERMAL hydrogen molecule, the hydrogen bonds can be selectively broken when the SUPERTHERMAL hydrogen collide on the surface of the organic material and does not destroy other chemical bonds. The carbon free radicals produced by the molecules are simultaneously coupled to realize the molecular chain crosslinking. Biological reason destruction is an environmentally friendly, mild surface modification method. We use this method to modify the surface of PC film. The main results are as follows: (1) the surface treatment of PC membrane by super hot hydrogen can achieve the cross-linking of the molecular chain on the surface of the PC membrane, and the water vapor transmission rate of thin films descends from the original 0.48 g/ (m2. Day) to the surface. 0.12 g/ (M2 day), and the original transmittance and mechanical strength of the PC film have not been affected; (2) the use of HHIC technology can graft polar polyacrylic acid (PAA) molecules on the surface of the membrane of the PC membrane to improve the wettability of the surface of the PC film (the water contact angle decreases from the initial 84 degrees to 23 degrees). (3) in order to further improve the water vapor barrier property of the PC membrane, A SiO2 coating with a thickness of 150 nm was deposited on the surface of PC and PC/PAA films by plasma enhanced chemical vapor deposition (PECVD). The water vapor permeability test showed that the water vapor barrier property of the film could be greatly improved by the introduction of SiO2 coating, and the water vapor transmission rate decreased from 0.48 g / m2. Day to 0.01 g/ (M2 day). The grafting of PAA significantly improves the binding force between PC and SiO2.
【学位授予单位】：西南科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2;O631
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