抗激光损伤薄膜的制备与性质研究
发布时间：2018-09-14 19:14
【摘要】：本实验中,通过尝试不同的Ti O_2溶液以及Ta_2O_5溶液的配制比例,最终配制出稳定性好且涂膜效果良好的溶液。在制备薄膜的过程中,配制溶液,涂制薄膜,以及薄膜的热处理等过程均对薄膜的光学性能及激光损伤阈值有着一定的影响。对此进行了探索研究,寻找合适的工艺条件来解决这些问题。在研究过程中,采用了多种方法对制备所得薄膜样品的性能进行测试表征,综合评价分析了薄膜样品的性能特点。通过测试和表征,得出以下结论:实验中涂制薄膜的溶液需一定的陈化时间,Ti O2溶液陈化约7天效果较佳,Ta_2O_5溶液则需要陈化20天左右。在涂制薄膜的过程中,需要对实验所处环境中的温度和湿度进行控制。室温为20℃左右,湿度低于35%,并且温度与湿度的控制对于涂制Ta_2O_5薄膜的作用效果尤为明显。同时,采用旋涂法涂制的薄膜容易出现辐射状条纹,而采用提拉法涂制薄膜,则可以有效的减轻或者避免薄膜出现辐射状条纹。在对薄膜样品的热处理过程中,发现缓慢升温可以有效避免薄膜开裂,并且升温的速率对Ti O2薄膜的作用效果尤为明显。采用一定压力的纯氧气氛围及较长时间的保温处理可以减轻或避免薄膜变色。当采用较高热处理温度时,可以提高薄膜样品的折射率;同时较高的热处理温度及较长的热处理时间可以使薄膜中的有机物和积碳等挥发彻底,从而减轻薄膜变色程度。但同时也发现采用较低温度热处理后的Ti O2薄膜及Ta_2O_5薄膜的激光阈值较高。因此,在实验中需要综合考虑各个方面的影响因素。
[Abstract]:In this experiment, the solution with good stability and good coating effect was prepared by using different proportions of Ti O _ 2 solution and Ta_2O_5 solution. In the process of preparing thin films, the preparation of solution, the coating of films and the heat treatment of the films all have a certain influence on the optical properties and laser damage threshold of the films. To solve these problems, we have explored and studied to find suitable technological conditions to solve these problems. In the course of the study, the properties of the films were tested and characterized by various methods, and the properties of the films were comprehensively evaluated and analyzed. By testing and characterizing, the following conclusions are drawn: in the experiment, the solution of coated film needs a certain aging time and the aging effect of TIO _ 2 solution is about 7 days. The solution of Ta2O5 needs to be aged for about 20 days. In the process of coating the film, the temperature and humidity in the experimental environment should be controlled. The temperature is about 20 鈩，
本文编号：2243629
[Abstract]:In this experiment, the solution with good stability and good coating effect was prepared by using different proportions of Ti O _ 2 solution and Ta_2O_5 solution. In the process of preparing thin films, the preparation of solution, the coating of films and the heat treatment of the films all have a certain influence on the optical properties and laser damage threshold of the films. To solve these problems, we have explored and studied to find suitable technological conditions to solve these problems. In the course of the study, the properties of the films were tested and characterized by various methods, and the properties of the films were comprehensively evaluated and analyzed. By testing and characterizing, the following conclusions are drawn: in the experiment, the solution of coated film needs a certain aging time and the aging effect of TIO _ 2 solution is about 7 days. The solution of Ta2O5 needs to be aged for about 20 days. In the process of coating the film, the temperature and humidity in the experimental environment should be controlled. The temperature is about 20 鈩，
本文编号：2243629
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