AAO模板溅射制备FePt纳米点阵及磁性研究

发布时间：2018-10-20 12:29

【摘要】：图案化磁记录技术采用二维有序磁性纳米阵列作为记录介质,它能够突破常规连续薄膜介质中存在的超顺磁效应极限,并有可能将硬盘存储面密度提升到5Tb/in2。图案化记录技术走向实用的关键是研发出高性能的图案化磁记录介质,由于FePt具有超高的磁各向异性能和极小的超顺磁临界尺寸,已成为制备图案化介质的一大热点材料。目前,制备工艺仍是图案化磁记录研究的主要挑战之一,现阶段主要有三种方法:一种方法是使用刻蚀印刷技术,但由于非常费时和高造价且它仅用于极小规模制备;另一种方法是自组装制备技术,抑制退火过程中粒子聚集和确保易磁化轴的高度有序排列仍需要深入研究;最后一种方法是模板合成技术,它能有效改善上述问题。本文采用模板合成技术,在孔径和厚度都较易调控的阳极氧化铝(AAO)模板上溅射制备FePt纳米点阵。本文首先介绍了磁控溅射系统及其机理,同时对模板及样品的微观分析和磁性能测试作了相关阐述。接下来,本文先采用极紫外光刻和ICP刻蚀等工艺成功制备了Si基二维有序微米孔模板,然后使用两步阳极氧化法制备纳米级多孔氧化铝模板,并通过调节实验参数制备出不同周期和孔径的AAO模板。最后,本文采用磁控溅射和定量刻蚀在阳极氧化铝模板上成功制备出FePt纳米点阵列,并详细探讨Ag底层、退火温度与模板孔径对FePt纳米点阵磁性能的影响,研究结果表明Ag底层能大幅度提升Fe Pt纳米点阵的垂直矫顽力,600°C退火后的FePt纳米点阵呈现出显著的L10相结构并具有较高的硬磁性能,80nm孔径模板相比40nm孔径模板更有利于FePt纳米颗粒的沉积与垂直磁性能的提高。
[Abstract]:The patterned magnetic recording technique uses two-dimensional ordered magnetic nanoarrays as the recording medium, which can break through the limit of superparamagnetic effect in conventional continuous film media, and it is possible to increase the storage surface density of hard disk to 5 TB / in 2. The key to the application of patterned recording technology is to develop a high performance patterned magnetic recording medium. Because FePt has super high magnetic anisotropy energy and minimal superparamagnetic critical size, it has become a hot material in the preparation of patterned medium. At present, the preparation process is still one of the main challenges in the research of patterned magnetic recording. At present, there are three main methods: one is to use etching printing technology, but because of its time-consuming and high cost, it is only used in very small scale preparation; Another method is self-assembly technology, which can suppress particle aggregation and ensure highly ordered arrangement of magnetized axis during annealing. The last method is template synthesis, which can effectively improve the above problems. In this paper, FePt nanoscale lattice was prepared by sputtering on anodic alumina (AAO) template with easy pore size and thickness control by template synthesis technique. In this paper, the magnetron sputtering system and its mechanism are introduced, and the microanalysis and magnetic properties of the templates and samples are also described. Secondly, we successfully prepared Si based two-dimensional ordered micropore templates by using ultra-violet lithography and ICP etching techniques, and then prepared nano-porous alumina templates by two-step anodic oxidation method. AAO templates with different periods and pore sizes were prepared by adjusting the experimental parameters. Finally, FePt nanowires array was successfully fabricated on anodic alumina template by magnetron sputtering and quantitative etching. The effects of Ag substrate, annealing temperature and template aperture on the magnetic properties of FePt nanoscale lattice were discussed in detail. The results show that the vertical coercivity of Fe Pt nanoscale lattice can be greatly enhanced by Ag substrate. The FePt nanoscale lattice annealed at 600 掳C exhibits significant L10 phase structure and high hard magnetic properties. 80nm pore size template is more than 40nm pore template. It is beneficial to the deposition of FePt nanoparticles and the improvement of perpendicular magnetic properties.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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