基于紫外光刻方法构建超疏水微纳结构及导电图案
发布时间：2018-10-26 14:59
【摘要】：导电聚合物的发现对微电子、光电工业制造技术革新有着极其重要的影响。而构造三维微纳结构的导电聚合物图案,可以广泛应用于显示器件、存储器件、集成电路、高敏度传感器等。本文通过紫外光刻及压印的方法在基板上制备亲、疏水的功能性聚合物表面,利用水溶性导电聚合物PEDOT:PSS在亲水性表面的选择性沉积构筑成功导电聚合物图案及微纳电路。首先,我们选用PDMS一次复制竹叶表面结构制备了具有仿生微纳结构的软模板。经过对模板压印聚合物图案性质表征,确定软模板完整复制了竹叶表面的微观结构且压印聚合物图案保持了竹叶表面的超疏水特性。其次,利用已制备的PDMS软模板,结合紫外光刻法在玻璃基板上制备出不同尺寸的亲疏水功能化聚合物表面。利用导电聚合物在亲水性区域的选择性沉积,通过旋涂法在聚合物表面上沉积DMSO掺杂的水溶性导电聚合物PEDOT:PSS。80℃退火5-10min制备了尺寸在50-500μm不等,且具有良好透光率和较高导电率的导电图案。另外,为了解决光刻胶组分良好的蚀刻性确保在基板上获得良好的导电聚合物图案,本文制备了具有良好酸致降解性的压印光刻胶,采用相同的导电图案制备工艺亦可制备不同尺寸导电图案。在酸性条件下,该光刻胶可降解剥离而不影响导电聚合物图案的结构完整性和光学电学性能。
[Abstract]:The discovery of conductive polymers has an extremely important impact on the innovation of manufacturing technology in microelectronics and optoelectronic industries. The conductive polymer pattern with 3D micro / nano structure can be widely used in display devices, memory devices, integrated circuits, high sensitivity sensors and so on. In this paper, the surface of hydrophobic functional polymer was prepared on the substrate by UV lithography and imprint. The patterns and microcircuits of conductive polymer were constructed by selective deposition of water-soluble conductive polymer PEDOT:PSS on the hydrophilic surface. Firstly, we prepared the soft template with biomimetic micro-nano structure by using PDMS to duplicate the surface structure of bamboo leaves at one time. By characterizing the properties of the template imprinted polymer pattern, it is determined that the soft template completely duplicates the microstructure of the bamboo leaf surface and the imprint polymer pattern keeps the superhydrophobic property of the bamboo leaf surface. Secondly, the hydrophobic functionalized polymer surfaces with different sizes were prepared on glass substrate by using the prepared PDMS soft template and UV lithography. Based on the selective deposition of conductive polymers in the hydrophilic region, DMSO doped water-soluble conductive polymers (PEDOT:PSS.80 鈩，
本文编号：2296097
[Abstract]:The discovery of conductive polymers has an extremely important impact on the innovation of manufacturing technology in microelectronics and optoelectronic industries. The conductive polymer pattern with 3D micro / nano structure can be widely used in display devices, memory devices, integrated circuits, high sensitivity sensors and so on. In this paper, the surface of hydrophobic functional polymer was prepared on the substrate by UV lithography and imprint. The patterns and microcircuits of conductive polymer were constructed by selective deposition of water-soluble conductive polymer PEDOT:PSS on the hydrophilic surface. Firstly, we prepared the soft template with biomimetic micro-nano structure by using PDMS to duplicate the surface structure of bamboo leaves at one time. By characterizing the properties of the template imprinted polymer pattern, it is determined that the soft template completely duplicates the microstructure of the bamboo leaf surface and the imprint polymer pattern keeps the superhydrophobic property of the bamboo leaf surface. Secondly, the hydrophobic functionalized polymer surfaces with different sizes were prepared on glass substrate by using the prepared PDMS soft template and UV lithography. Based on the selective deposition of conductive polymers in the hydrophilic region, DMSO doped water-soluble conductive polymers (PEDOT:PSS.80 鈩，
本文编号：2296097
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