基于二维材料的DNA检测器件制造及应用研究

发布时间：2018-10-31 14:46

【摘要】：纳米孔DNA检测技术作为第三代基因测序技术的引领者,具有免标记、免扩增、大通量等优点,是最有希望实现低成本快速测序的方法。纳米孔DNA检测技术中应用的纳米孔材料包括固态纳米孔和生物纳米孔,随着半导体加工技术越来越成熟,固态纳米孔正逐渐在纳米孔DNA检测技术中崭露头角。当二维材料被发现并成功实现实验室制备之后,如何将二维材料的优秀性能与纳米孔DNA检测有机结合起来已经成为该领域中的研究热点。本文采用实验的办法,选取二维材料中的石墨烯和MoS2(二硫化钼)作为纳米孔材料,制备了纳米孔器件,并进行了DNA检测研究。针对石墨烯材料,本文分析对比了氧化还原、碳化硅热解外延、机械剥离以及化学气相沉积等制备方法,最后选择以化学气相沉积法来制备用于纳米孔DNA检测的石墨烯,在以铜箔为衬底、甲烷为碳源的实验条件下成功制得了高质量大面积的单层石墨烯并成功转移至用于DNA检测的Si3N4/Si基底上。基于转移好的石墨烯,本文利用聚焦离子束系统制备出了纳米孔器件进行了DNA检测实验。实验结果表明：采用等离子处理石墨烯纳米孔能够显著改善纳米孔的亲水性、增大纳米孔的有效直径和减少DNA检测实验的噪音；利用石墨烯纳米孔能够实现单链DNA的检测以及单链DNA与双链DNA的区分。针对MoS2材料,本文就目前只能通过机械剥离方法来制备高质量MoS2二维材料的情况,开发了一种能应用于绝大多数机械剥离二维材料的高精度可控转移方法,在不对二维材料本身以及目标基底造成破坏的情况下,成功实现了机械剥离MoS2向S13N4/Si基底的转移以及石墨烯/MoS2异质结构的制备,证明了该方法的可行性和适应性。在成功完成转移实验的基础上,本文研究了基于MoS2的场效应晶体管与纳米孔DNA检测器件结合的可行性,设计了一套实现该种复合器件加工的工艺方案,并通过实验设计,完成了该类型器件在进行DNA过孔实验时阻塞电流信号的检测,实验结果表明该类型器件具有高信噪比和高稳定性的特点。
[Abstract]:As the leader of the third generation gene sequencing technology, nano-pore DNA detection technology has the advantages of no marker, no amplification, large throughput and so on. It is the most promising method to realize low cost and fast sequencing. Nano-pore materials used in nano-pore DNA detection technology include solid-state nano-pore and biological nano-pore. With the development of semiconductor processing technology, solid-state nano-pore is gradually emerging in nano-pore DNA detection technology. After the two-dimensional materials were discovered and successfully prepared in the laboratory, how to combine the excellent properties of two-dimensional materials with nano-pore DNA detection has become a research hotspot in this field. In this paper, graphene and MoS2 (molybdenum disulfide) in two-dimensional materials are selected as nano-porous materials to prepare nano-porous devices, and DNA detection is carried out. For graphene materials, the preparation methods of redox, pyrolysis and epitaxy of silicon carbide, mechanical stripping and chemical vapor deposition were compared. Finally, graphene was prepared by chemical vapor deposition method for DNA detection of nano-pore. Under the experimental conditions of copper foil and methane as carbon source, a high quality and large area graphene monolayer was successfully prepared and transferred to the Si3N4/Si substrate for DNA detection. Based on the transferred graphene, the nano-porous devices were fabricated by focused ion beam system for DNA detection. The experimental results show that plasma treatment of graphene nanoparticles can significantly improve the hydrophilicity of nano-pores, increase the effective diameter of nano-pores and reduce the noise of DNA test. The detection of single-stranded DNA and the distinction between single-stranded DNA and double-stranded DNA can be realized by using graphene nano-pore. Aiming at MoS2 materials, a high precision and controllable transfer method which can be applied to most mechanical stripping two-dimensional materials is developed in this paper, which can only be prepared by mechanical stripping method. The transfer of mechanical stripping of MoS2 to S13N4/Si substrate and the preparation of graphene / MoS2 heterostructure have been successfully realized without destroying the two-dimensional material and the target substrate. The feasibility and adaptability of this method have been proved. On the basis of successful transfer experiment, the feasibility of combining field effect transistor based on MoS2 with nano-hole DNA detection device is studied in this paper. A set of process scheme is designed to realize the fabrication of this kind of composite device, and the experimental design is carried out. The blocking current signal of this type of device is detected during the DNA perforation experiment. The experimental results show that the type of device has the characteristics of high signal-to-noise ratio (SNR) and high stability.
【学位授予单位】：东南大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：Q78;TB383.1

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