高温退火降低碳纳米管接触电阻的实验研究

发布时间：2018-11-08 18:56

【摘要】：将碳纳米管有效地集成到微纳器件上实现组装是碳纳米管在众多领域得以应用的先决条件,组装后较高的接触电阻成为影响碳纳米管器件性能的重要因素,为了降低碳纳米管与电极之间的接触电阻,采用高温退火法对组装后的碳纳米管进行处理.首先,通过介电电泳法组装碳纳米管;其次,利用正交试验设计和方差分析研究高温退火过程中退火温度、保温时间和升温速率对降低碳纳米管接触电阻的影响,并获得了降低接触电阻的最优参数组合;最后,对退火前后碳纳米管的I-V特性进行测量、分析.结果表明:高温退火可以简单、高效地降低碳纳米管的接触电阻,退火温度是影响降阻效果的主要因素,退火处理后接触电阻的下降幅度最高可达91.59%,组装的碳纳米管退火前后的I-V特性曲线均呈现良好的线性.
[Abstract]:The effective integration of carbon nanotubes into micro / nano devices is a prerequisite for the application of carbon nanotubes in many fields. The high contact resistance after assembly has become an important factor affecting the performance of carbon nanotubes devices. In order to reduce the contact resistance between carbon nanotubes and electrodes, the assembled carbon nanotubes were treated by high temperature annealing. Firstly, carbon nanotubes were assembled by dielectric electrophoresis. Secondly, the effects of annealing temperature, holding time and heating rate on the reduction of contact resistance of carbon nanotubes during high temperature annealing were studied by orthogonal test design and variance analysis, and the optimal parameter combination of reducing contact resistance was obtained. Finally, I-V characteristics of carbon nanotubes before and after annealing were measured and analyzed. The results show that high temperature annealing can reduce the contact resistance of carbon nanotubes easily and efficiently. The annealing temperature is the main factor that affects the resistance reduction. The maximum decrease of contact resistance can reach 91.59 after annealing. The I-V characteristic curves of the assembled CNTs show good linearity before and after annealing.
【作者单位】：华北理工大学机械工程学院;
【基金】：国家自然科学基金资助项目(51172062,51472074) 河北省“百人计划”资助项目(E2012100005)
【分类号】：O613.71;TB383.1

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