AFM探针诱导介电泳的三维纳米操作与装配

发布时间：2018-11-09 07:51

【摘要】：伴随着纳米领域研究的飞速发展,以纳米操作为核心的纳米加工制造是纳米科技中最具前瞻性和带动性的重点领域之一。相对于基于自组装,光镊,磁镊和SEM的纳米操作技术有操作精度低、效率低、成本昂贵或对样本性能有特殊要求等局限性,具有高分辨率和高操作精度的原子力显微镜(AFM),具有高操作效率和普适性的介电泳(DEP),在纳米操作领域具有更广的应用范围。然而,AFM依然存在操作效率低,无法满足批量操作的需求,传统的DEP操作需要固定的物理电极、灵活性差,在纳米尺度缺乏高操作精度和单个操作的能力。这些因素限制了AFM和DEP的进一步发展应用。因此,如何扬长避短,把基于AFM和DEP的纳米操作进行优势互补,即把AFM优秀的定位和高精度操作的能力与DEP技术高效的操作能力结合起来,是一个值得研究的问题。为了实现上述研究目标,本文围绕AFM探针诱导介电泳的三维纳米操作与装配开展理论和实验上的探索研究。具体工作主要包括以下几个方面:(1)实验模型方案设计以及实验操作平台搭建:AFM导电探针与ITO导电玻璃作为对电极结合起来,导电探针在溶液中作为一个可移动的3D DEP镊子进行探针诱导DEP操作;(2)AFM探针诱导介电泳的理论仿真与分析:用COMSOL Multiphysics 4.3a软件建立了一个模型来对影响实验结果的几个参数进行理论仿真和数值分析。(3)微流控芯片的设计加工:为了实验操作过程的可控性,连续性,按照连通器的原理设计了一个可连续精确地维持稳定的液态操作环境的微流控芯片。(4)面向AFM的纳米目标快速自动化重定位方法研究:为了解决在精确表征实验结果时,由于探针污染,以及样本基底的移动等因素而需要面临目标重定位的问题,我们探究了一种面向AFM的纳米目标快速自动化重定位方法,通过识别一对参照点,可以依次实现对基底上多个纳米目标的免标记重定位。(5)实验结果的表征评估标准:用体积来作为评估实验结果的标准,探索了等体积转化计算的方法,来计算复杂不规则三维纳米结构的体积。(6)实验参数的验证与优化:在对仿真结果进行了实验验证以及实验参数优化分析的基础上,将纳米小球操作形成了三维纳米点阵和线状结构。通过对AFM探针诱导介电泳的三维纳米操作与装配的实验模型的设计与平台构建,在理论分析的基础上进行了细致的实验验证,充分证明这种探针诱导介电泳技术是可行的,未来将会在纳米结构和阵列的快速制造,以及生物纳米粒子的精确可控无损操作等方面具有极大的应用潜力。
[Abstract]:With the rapid development of nanoscale research, nanofabrication with nanometer operation as the core is one of the most prospective and leading areas in nanotechnology. Compared with the nanotechnology based on self-assembly, optical tweezers, magnetic tweezers and SEM, it has some limitations, such as low precision, low efficiency, high cost or special requirements for the performance of the sample. It has the advantages of high resolution and high precision in atomic force microscope (AFM),). Dielectric electrophoretic (DEP), with high operation efficiency and universality has a wider range of applications in the field of nanometer operation. However, AFM still has low operation efficiency and can not meet the needs of batch operation. Traditional DEP operation requires fixed physical electrodes, which has poor flexibility, and lacks the ability of high precision and single operation in nanometer scale. These factors limit the further development and application of AFM and DEP. Therefore, how to take advantage of the advantages and avoid disadvantages and complement the advantages of AFM and DEP nanooperations, that is to say, combine the excellent positioning and high precision operation ability of AFM with the efficient operation ability of DEP technology, is a problem worth studying. In order to achieve the above research goal, the theoretical and experimental research on the three-dimensional nano-manipulation and assembly of AFM probe induced dielectric electrophoresis was carried out in this paper. The main work includes the following aspects: (1) the design of the experimental model and the construction of the experimental operating platform: the AFM conductive probe and the ITO conductive glass are combined as the opposite electrode. The conductive probe acts as a movable 3D DEP tweezers to induce DEP operation in the solution. (2) theoretical simulation and analysis of AFM probe induced dielectric electrophoresis: using COMSOL Multiphysics 4.3a software, a model is established to simulate and analyze several parameters that affect the experimental results. (3) Design of microfluidic chip Processing: for the controllability of the process of experimental operation, Continuity, According to the principle of the connectors, a microfluidic chip is designed to maintain a stable liquid operating environment continuously and accurately. (4) the fast automatic repositioning method for nano-targets for AFM is studied: in order to solve the problem of accurately characterizing the experimental results, Because of the contamination of the probe and the moving of the sample substrate, we need to face the problem of target relocating. We have explored a fast automatic relocation method for the nanometer target for AFM, which can identify a pair of reference points. It is possible to realize the localization of multiple nanoscale targets on the substrate in turn. (5) the evaluation criteria for the characterization of experimental results: the volume is used as the criterion for evaluating the experimental results, and the calculation method of equal volume conversion is explored. (6) Verification and optimization of experimental parameters. The nanospheres were operated to form a three-dimensional nano-lattice and a linear structure. Through the design and construction of the experimental model of three-dimensional nanoscale operation and assembly of AFM probe induced dielectric electrophoresis, the detailed experimental verification is carried out on the basis of theoretical analysis. It is fully proved that this probe induced dielectric electrophoresis technology is feasible. In the future, it will have great potential in the rapid fabrication of nanostructures and arrays, as well as in the precise, controllable and non-destructive operation of biological nanoparticles.
【学位授予单位】：沈阳理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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