金属纳结构的红外光热特性及其应用

发布时间：2018-12-15 12:39

【摘要】：近年来,金属纳结构在各领域得到了广泛的关注和研究。金属纳米线作为一种典型的金属纳结构,已经在生物医疗和光电子器件领域得到了实际应用。目前,对于金属纳米线的研究多集中在可见光或近红外波段,其在中远红外波段,尤其是远红外大气窗口8~14?m的特性尚未有系统的研究。本文研究了金属纳米线在红外波长,尤其是8~14?m波段的光学和热学特性,并且以红外探测领域为列,研究了金属纳米线热探测器的性能,设计、制备了雏形器件,并进行了性能测试,为器件性能的进一步优化和工艺改进提供了理论和实验基础。主要内容包括:(1)利用多物理场有限元仿真软件COMSOL Multiphysics对金属纳米线的光学特性和热学特性进行了仿真研究。研究了金属纳米线的几何尺寸与其光热特性的关系,发现金属纳米线的天线谐振效应决定吸收峰位置,而纳米线的纵横比影响相对吸收截面的大小,同时纳米线周围介质、纳米线材料、SiO2隔热层、反射层等也对金属纳米线的特性有明显影响。(2)研究了金属纳米线热探测器的性能,制备了雏形器件,探索器件制备的工艺流程和工艺参数。对涉及到的光刻和镀膜工艺参数进行了优化,同时解决了制作过程中遇到的如金属膜脱落等问题。(3)对器件的性能进行了测试,结果与仿真预测相符,器件性能优异。同时分析了目前存在的问题,提出了改进的措施。
[Abstract]:In recent years, metal nanostructures have received extensive attention and research in various fields. As a typical nanometallic structure, metal nanowires have been widely used in biomedical and optoelectronic devices. At present, most of the researches on metal nanowires are focused on the visible or near infrared bands. The characteristics of metal nanowires in the middle and far infrared bands, especially in the far infrared atmospheric window of 8 ~ (14) m, have not been systematically studied. In this paper, the optical and thermal properties of metal nanowires at infrared wavelength, especially at 814 nm band are studied. The properties of metal nanowire thermal detectors are studied in the field of infrared detection, and the prototype devices are designed and fabricated. The performance tests are carried out, which provide theoretical and experimental basis for further optimization of device performance and process improvement. The main contents are as follows: (1) the optical and thermal properties of metal nanowires are simulated by using multi-physical field finite element simulation software COMSOL Multiphysics. The relationship between the geometrical size of metal nanowires and their photothermal properties is studied. It is found that the resonant effect of the antenna of metal nanowires determines the position of absorption peaks, and the aspect ratio of nanowires affects the relative absorption cross section and the media around the nanowires. Nanowire materials, SiO2 thermal insulation layer and reflectance layer also have a significant impact on the characteristics of metal nanowires. (2) the properties of metal nanowire thermal detectors are studied, embryonic devices are prepared, and the process flow and process parameters are explored. The process parameters of lithography and coating are optimized and the problems such as metal film shedding are solved. (3) the performance of the device is tested and the results are in accordance with the simulation prediction and the device performance is excellent. At the same time, the existing problems are analyzed, and the improvement measures are put forward.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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