PEM控制合成碳掺杂钛氧薄膜的成分结构研究
发布时间：2018-12-15 20:01
【摘要】：采用等离子体发射监测(PEM)系统实现闭环控制反应气体流量,使反应溅射稳定在滞回曲线过渡区,并以气相CO_2和O_2为碳源和氧源制备了碳掺杂钛氧(C∶Ti-O)薄膜。采用原子力显微镜、掠入射X射线衍射和X射线光电子能谱表征薄膜的表面形貌、结构、成分,紫外-可见分光光度计测试薄膜透射率并用Tauc作图法计算薄膜的带隙宽度。结果表明,随着辉光强度设定点(SP)的增大,沉积速率增大,薄膜中Ti-C键含量增多,带隙宽度降低,薄膜的结晶性增强且有利于金红石相的形成。
[Abstract]:The plasma emission monitoring (PEM) system is used to realize the closed-loop control of the reactive gas flow and the reactive sputtering is stabilized in the hysteretic curve transition region. Carbon doped titanium oxide (C:Ti-O) thin films were prepared by gas phase CO_2 and O _ 2 as carbon and oxygen sources. The surface morphology, structure, composition and transmittance of the films were measured by atomic force microscope, grazing incident X-ray diffraction and X-ray photoelectron spectroscopy. The band gap width of the films was calculated by Tauc method. The results show that with the increase of (SP), the deposition rate increases, the Ti-C bond content in the film increases, the band gap width decreases, the crystallinity of the film increases and the rutile phase is formed.
【作者单位】： 南海海洋资源与利用国家重点实验室;海南大学材料与化工学院热带岛屿资源先进材料教育部重点实验室;
【基金】：国家自然科学基金(51461015) 海南省重点项目(ZDYF2016019) 海南大学研究生实践创新项目
【分类号】：TB383.2
本文编号：2381211
[Abstract]:The plasma emission monitoring (PEM) system is used to realize the closed-loop control of the reactive gas flow and the reactive sputtering is stabilized in the hysteretic curve transition region. Carbon doped titanium oxide (C:Ti-O) thin films were prepared by gas phase CO_2 and O _ 2 as carbon and oxygen sources. The surface morphology, structure, composition and transmittance of the films were measured by atomic force microscope, grazing incident X-ray diffraction and X-ray photoelectron spectroscopy. The band gap width of the films was calculated by Tauc method. The results show that with the increase of (SP), the deposition rate increases, the Ti-C bond content in the film increases, the band gap width decreases, the crystallinity of the film increases and the rutile phase is formed.
【作者单位】： 南海海洋资源与利用国家重点实验室;海南大学材料与化工学院热带岛屿资源先进材料教育部重点实验室;
【基金】：国家自然科学基金(51461015) 海南省重点项目(ZDYF2016019) 海南大学研究生实践创新项目
【分类号】：TB383.2
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1 段永利;许生;巴德纯;范垂祯;;使用PEM监控制备光致亲水性TiO_2薄膜的研究[A];中国真空学会2006年学术会议论文摘要集[C];2006年
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