原位微纳米压痕测试装置设计分析与试验研究

发布时间：2018-12-17 05:26

【摘要】：新材料、新工艺的研究与应用是推动科技发展的重要因素，为获得材料更好的性能，人们对材料性能的研究逐渐从宏观层面发展到微观层面，测试精度从毫米级别，到微/纳米级别。因此，研制开发能够对材料微观力学行为进行精确测试的，并能够对材料在多种载荷作用下对材料的变形及损伤机制进行有效评估的仪器装备显得十分重要。本论文在查阅大量国内外相关文献的基础上，对比国内外压痕测试仪器的发展现状和现存问题进行总结归纳，结合项目设计要求，对测试装置进行基础理论分析修正、整体结构设计、零部件设计分析、控制方案设计研究、装配调试和校准等工作。在此基础之上，利用自制的仪器开展典型材料的压痕测试和较大压入深度情况下的原位测试试验。论文主要研究内容概括如下：（1）本论文在查阅大量国内外相关文献的基础上，分析微纳米压痕测试技术和原位测试技术的国内外发展现状，对市场上广泛应用的压痕测试仪器进行详细介绍和综合评定，总结归纳现有压痕测试仪器的优点和缺点；对材料原位测试技术的国内研究进展进行详细介绍，总结出材料原位测试技术的发展趋势和瓶颈。（2）以经典理论——OliverPharr方法为本文所述装置的理论基础，详细推导其计算过程，并提出补充修正算法；归类常用压电材料，详述压电叠堆特性和局限性，指导压电元器件选择和使用；建立微纳米压痕测试装置的核心零件——柔性铰链的刚度数学模型，并推导出其轴向刚度的数学算法，为后续的仿真分析提供理论依据。对装置控制方案进行设计分析，为控制程序编写提供指导。（3）从精确实现原位微纳米压痕测试功能的角度出发，满足设计参数要求前提下，结合整机结构合理布置本装置结构及位置，运用微纳米压痕测试力学和原位观测的原理和方法，结合现有检测手段和设备，选择恰当的检测措施及设备，优化布局检测部件位置，结合整机精度要求适当利用不同动力驱动和载荷加载方式，为装置提供精确的速度和位移，从而实现对试件材料进行微纳米压痕测试试验和原位观测测试试验。（4）以确保和检验测试装置的精度、重复性和稳定性为目的，，采用适当标定方法和设备，对力传感器反复多次标定试验，验证其信号的线性度和稳定性，归类分析各种影响压痕测试试验的因素，提出相应解决办法，对多种典型常见材料进行多次不同最大压入载荷下的测试试验，对仪器测试结果进行分析检验，并修正测试算法。在此基础上，利用该仪器对T2紫铜和N6镍进行较大压入深度情况下的原位测试实验，依据测试结果对该材料性能进行分析。
[Abstract]:The research and application of new materials and new processes are important factors to promote the development of science and technology. In order to obtain better properties of materials, the research on material properties has gradually developed from macroscopic to microscopic, and the precision of testing has changed from millimeter level. To the micro / nano level. Therefore, it is very important to develop instruments that can accurately test the microscopic mechanical behavior of materials and can effectively evaluate the deformation and damage mechanism of materials under various loads. On the basis of consulting a large number of domestic and foreign related literature, this paper compared the development status and existing problems of indentation testing instruments at home and abroad, combined with the project design requirements, the basic theoretical analysis and correction of the testing device, Integral structure design, parts design analysis, control scheme design research, assembly debugging and calibration work. On this basis, the indentation test of typical materials and the in-situ test under the condition of large indentation depth are carried out by using the self-made instrument. The main contents of this thesis are summarized as follows: (1) on the basis of consulting a large number of domestic and foreign literature, this paper analyzes the domestic and international development of micro-nano indentation testing technology and in-situ testing technology. The indentation testing instruments widely used in the market are introduced and evaluated in detail, and the advantages and disadvantages of the existing indentation testing instruments are summarized. The domestic research progress of in-situ testing technology is introduced in detail, and the development trend and bottleneck of in-situ testing technology are summarized. (2) based on the classical theory, the OliverPharr method is used as the theoretical basis of the device described in this paper, the calculation process is deduced in detail, and a supplementary correction algorithm is proposed. The common piezoelectric materials are classified and the characteristics and limitations of piezoelectric stack are described in detail to guide the selection and use of piezoelectric components. The stiffness mathematical model of flexure hinge, the core part of micro-nano indentation testing device, is established, and the mathematical algorithm of axial stiffness is deduced, which provides a theoretical basis for subsequent simulation analysis. Design and analyze the control scheme of the device and provide guidance for the programming of the control program. (3) from the point of view of accurately realizing the function of in-situ micro-nano indentation testing and satisfying the requirements of design parameters, the structure and position of the device are reasonably arranged in combination with the whole machine structure. Using the principle and method of micro-nano indentation testing mechanics and in situ observation, combining with the existing testing means and equipment, selecting the appropriate detection measures and equipment, optimizing the location of the inspection parts. According to the accuracy requirement of the whole machine, different dynamic driving and load loading modes are used properly to provide accurate velocity and displacement for the device, so that the micro-nano indentation test and in-situ observation test of the material can be carried out. (4) in order to ensure and verify the accuracy, repeatability and stability of the test device, the force sensor is calibrated repeatedly by using appropriate calibration methods and equipment to verify the linearity and stability of its signal. The factors affecting indentation test are classified and analyzed, and the corresponding solutions are put forward. The test results of several typical common materials under different maximum indentation loads are analyzed and verified, and the test algorithm is revised. On the basis of this, the in-situ test of T2 copper and N6 nickel were carried out under the condition of high depth of indentation, and the properties of the material were analyzed according to the test results.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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