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磁控溅射技术沉积NSN70隔热膜的实验研究

发布时间:2018-12-29 07:28
【摘要】:利用磁控溅射技术,在柔性基材PET上沉积Ag Cu合金制备的NSN系列隔热膜,继承了单Ag隔热膜良好的光谱选择性,同时能有效的解决Ag易硫化的难题。通过选择合适的Ag Cu合金靶材、NSN70隔热膜的膜系设计与制备、样品的形貌检测、耐候性实验、光学性能测试等多方面研究了NSN隔热膜。实验结果为以后大规模工业化生产NSN系列隔热膜奠定基础。
[Abstract]:Using magnetron sputtering technique, the NSN series thermal insulation film prepared by Ag Cu alloy deposited on the flexible substrate PET has inherited the excellent spectral selectivity of the single Ag thermal insulation film, and can effectively solve the problem of easy vulcanization of Ag. By selecting suitable Ag Cu alloy target, designing and preparing the film system of NSN70 insulation film, examining the morphology of the sample, weathering test and optical property test, the NSN insulation film was studied. The experimental results lay a foundation for the large-scale industrial production of NSN series thermal insulation films.
【作者单位】: 核工业西南物理研究院;
【分类号】:TB383.2


本文编号:2394492

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