基于蓝宝石基底的3ω谐波探测器研制

发布时间：2019-01-26 19:35

【摘要】：作为材料最基本的性能之一,热物性是对特定热过程进行基础研究、分析计算和工程设计的关键参数,也是能源技术发展的基础。热物性测量一直是材料研究中最基础同时也最重要的需求。传统的热物性测量方法如闪光法、保护热板法等因各有其限制条件,无法满足热物性测量中快速、精确、普适的要求。近年来,3ω法作为新兴的热物性测量方法因其适用范围广、可测参数多、精度高而得到快速发展,如今已被广泛用于热物性测量研究。尤其是独立型聚酰亚胺薄膜探测器的研制成功,极大地降低了测量成本,简化了测量步骤,进一步拓宽了3ω方法的适用范围。由于聚酰亚胺薄膜的存在以及其较低的热扩散率,测量信号需要在较低频率才能穿过薄膜到达样品。对于锁相放大器而言,频率越低就需要更长的扫描时间,也就导致整个测量过程非常耗时。为了从根本上解决这一问题,本文从独立探测器基底材料的选取入手,选取了热扩散率高的蓝宝石材料。根据穿透深度公式,要达到相同的穿透深度,材料热扩散率越大需要的频率越高,锁相放大器所需要的扫描时间就更短,从而缩短了整个测量过程的耗时。同时,蓝宝石莫氏硬度高达9,仅次于金刚石,可以很好的保护金属带探测器,从而使探测器达到耐用目的。本文选择了一维薄膜导热模型对测试结构进行导热分析,将测量装置看做两层结构进行分析,上层为蓝宝石基底,下层为待测样品。同时使用matlab软件计算了蓝宝石基底内部的面向热损失,得出了测量时进入样品的有效热流比。我们对一系列的标准试样进行测试,如有机玻璃、石英玻璃、不锈钢、铝和铜等。实验证明,采用蓝宝石作为基底材料,信号可以快速到达样品,从而缩短了测量过程所消耗的时间。同时,从制作完成到测试结束相当长的时间里,探测器未发生断裂、破碎等损坏现象,比聚酰亚胺薄膜探测器更耐用。
[Abstract]:As one of the most basic properties of materials, thermal properties are the key parameters for the analysis, calculation and engineering design of specific thermal processes, and are also the basis for the development of energy technology. The measurement of thermal properties has always been the most basic and important requirement in material research. Traditional methods of measuring thermal properties, such as flash method, protective hot plate method and so on, can not meet the requirements of fast, accurate and universal measurement because of their limited conditions. In recent years, 3 蠅 method has been developed rapidly because of its wide range of application, many parameters and high precision, and has been widely used in the research of thermal physical properties measurement. Especially, the successful development of independent polyimide thin film detector greatly reduces the cost of measurement, simplifies the measuring steps and further widens the application range of the 3 蠅 method. Due to the existence of polyimide film and its low thermal diffusivity, the measured signals need to be passed through the film at a lower frequency to reach the sample. For phase-locked amplifiers, the lower the frequency, the longer the scanning time, which makes the whole measurement process very time-consuming. In order to solve this problem fundamentally, the sapphire material with high thermal diffusivity is selected from the selection of the substrate material of the independent detector. According to the penetration depth formula, to reach the same penetration depth, the higher the material thermal diffusivity is, the higher the required frequency is, and the shorter the scanning time is for the phase-locked amplifier, thus shortening the time consuming of the whole measurement process. At the same time, the sapphire Morse hardness is up to 9, second only to diamond, which can protect the metal band detector and make the detector durable. In this paper, a one-dimensional thin film thermal conductivity model is selected to analyze the thermal conductivity of the test structure. The measuring device is treated as a two-layer structure. The upper layer is sapphire substrate and the lower layer is the sample to be tested. At the same time, the heat loss in the sapphire substrate was calculated by matlab software, and the effective heat flux ratio was obtained. We test a range of standard samples, such as plexiglass, quartz glass, stainless steel, aluminum and copper. It is proved by experiments that sapphire as substrate material can reach the sample quickly, thus shortening the time consumed in the measurement process. At the same time, from the completion of fabrication to the end of the test a long time, the detector did not break, broken and other damage, than the polyimide film detector is more durable.
【学位授予单位】：中国科学院研究生院(工程热物理研究所)
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB302

【共引文献】