功能型微纳复合结构的制备及其应用
发布时间：2019-05-13 08:00
【摘要】：人们在探索自然界的过程中,观察到了许多生物材料具有特殊功能,研究发现这些材料所具有的种种的特性都离不开其表面的微纳结构,进而在材料表面制备出具有相似的微纳结构就可以得到具有特殊性质的界面材料。微纳复合材料的种种特性使其在日常生活、药物检测、国防建设等诸多领域展现出巨大的应用潜力。因此推动微纳米材料的制备发展在科学研究和实际生产应用领域都有着非常重要的意义。本文基于紫外光刻和铝基纳米材料的制备技术,通过使用前者完成铝基微米阵列结构的制备,之后使用一定的阳极氧化技术或者水浴法在已制备的微米结构基础上完成微纳米复合结构勃姆石的制备。首先,对结合紫外光刻技术与阳极氧化技术制备孔状微纳结构的工艺进行了研究；选用不同的基片材料作为光刻衬底,在完成图形转以后,发现硅片效果最好,铝片次之,玻璃片最差。高纯抛光铝和抛光液抛光铝材质的不同会导致纳米孔生长的孔径等方面出现较大差异同时纳米孔排布不同。高纯抛光铝纳米孔生长速率明显低于抛光液抛光铝。分析了存在一定差异的基片作为衬底时对于光刻参数设置的影响；纳米生长前进行退火处理会获得相较于未退火更好的纳米孔状结构；使用二次阳极氧化工艺制备的微纳复合结构排列更规则。其次,研究了紫外光刻技术与铝材料水浴法制备叶片状微纳结构的工艺,确定使用铝材料水浴所制备的材料为勃姆石。研究了铝材料水浴过程中水质对于纳米叶片状结构的影响较大,自来水中的氯离子是影响叶片状纳米结构的主要因素；时间的延长纳米叶片状结构的厚度有轻微增大；在使用600℃退火后,材料的表面形貌未发生较大的变化。最后,使用接触角测量仪对所制备的微纳结构进行材料浸润性测试,发现微纳复合材料的浸润性相对单纯的纳米结构会有明显的增强效果,孔状微纳米结构可达高亲水,叶片状微纳复合结构可以增强至超亲水状态。使用勃姆石片状纳米材料作为增强拉曼散射(SESR)基底,发现了明显的拉曼增强效果。对微纳结构的应用前景及研究方向进行了展望和深入的讨论,为快速、高效、低成本制备微纳米复合结构材料提出了新的思路。
[Abstract]:In the process of exploring nature, it has been observed that many biomaterials have special functions, and it is found that the properties of these materials can not be separated from the micro-nano structure of their surface. Furthermore, the interface materials with special properties can be obtained by preparing similar micro-nano structures on the surface of the materials. The properties of micro-nano composites make it show great application potential in many fields, such as daily life, drug detection, national defense construction and so on. Therefore, it is of great significance to promote the preparation and development of micro-nanomaterials in the field of scientific research and practical production and application. In this paper, based on the preparation technology of ultraviolet lithography and aluminum-based nanomaterials, the preparation of aluminum-based micron array structure is completed by using the former. After that, some anodizing technology or water bath method was used to prepare boehmil with micro-nanocomposite structure on the basis of the prepared micron structure. Firstly, the preparation of pore micro-nano structure by UV lithography and anodizing was studied. Different substrate materials were selected as lithography substrate. After the graphic conversion was completed, it was found that the effect of silicon wafer was the best, that of aluminum sheet was the second, and that of glass sheet was the worst. The difference of high purity polished aluminum and polishing liquid polished aluminum will lead to great differences in the pore size of nanoporous growth and the arrangement of nanoporous. The growth rate of nano-pores in high purity polished aluminum was significantly lower than that in polishing solution. The influence of substrate as substrate on photolithography parameter setting is analyzed, and the nano-porous structure can be obtained by annealing before nano-growth compared with unannealed substrate, and the experimental results show that the nano-porous structure is better than that of non-annealed substrate before nano-growth. The arrangement of micro-nano composite structure prepared by secondary anodizing process is more regular. Secondly, the preparation of blade micro-nano structure by UV lithography and aluminum water bath was studied, and the material prepared by aluminum water bath was determined to be boehmil. The effect of water quality on the nano-blade-like structure was studied, the chloride ion in tap water was the main factor affecting the blade-like nanostructure, the thickness of the nano-blade-like structure was slightly increased with the prolongation of time, and the thickness of the nano-blade-like structure was slightly increased with the prolongation of the time. After annealing at 600 鈩，
本文编号：2475721
[Abstract]:In the process of exploring nature, it has been observed that many biomaterials have special functions, and it is found that the properties of these materials can not be separated from the micro-nano structure of their surface. Furthermore, the interface materials with special properties can be obtained by preparing similar micro-nano structures on the surface of the materials. The properties of micro-nano composites make it show great application potential in many fields, such as daily life, drug detection, national defense construction and so on. Therefore, it is of great significance to promote the preparation and development of micro-nanomaterials in the field of scientific research and practical production and application. In this paper, based on the preparation technology of ultraviolet lithography and aluminum-based nanomaterials, the preparation of aluminum-based micron array structure is completed by using the former. After that, some anodizing technology or water bath method was used to prepare boehmil with micro-nanocomposite structure on the basis of the prepared micron structure. Firstly, the preparation of pore micro-nano structure by UV lithography and anodizing was studied. Different substrate materials were selected as lithography substrate. After the graphic conversion was completed, it was found that the effect of silicon wafer was the best, that of aluminum sheet was the second, and that of glass sheet was the worst. The difference of high purity polished aluminum and polishing liquid polished aluminum will lead to great differences in the pore size of nanoporous growth and the arrangement of nanoporous. The growth rate of nano-pores in high purity polished aluminum was significantly lower than that in polishing solution. The influence of substrate as substrate on photolithography parameter setting is analyzed, and the nano-porous structure can be obtained by annealing before nano-growth compared with unannealed substrate, and the experimental results show that the nano-porous structure is better than that of non-annealed substrate before nano-growth. The arrangement of micro-nano composite structure prepared by secondary anodizing process is more regular. Secondly, the preparation of blade micro-nano structure by UV lithography and aluminum water bath was studied, and the material prepared by aluminum water bath was determined to be boehmil. The effect of water quality on the nano-blade-like structure was studied, the chloride ion in tap water was the main factor affecting the blade-like nanostructure, the thickness of the nano-blade-like structure was slightly increased with the prolongation of time, and the thickness of the nano-blade-like structure was slightly increased with the prolongation of the time. After annealing at 600 鈩，
本文编号：2475721
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