离子束溅射氧化物薄膜的中红外特性研究
发布时间：2019-05-28 14:21
【摘要】：中红外2-6μm波段是红外探测器和化学激光器的主要工作波段之一,应用在这一波段的光学薄膜材料主要是氟化物、硫化物和硒化物等软膜材料。氧化物具有优越的机械特性和环境稳定性,已广泛的应用于可见近红外波段,制备高性能光学薄膜。但是关于氧化物在中红外波段的研究及应用很少有相关报导,开展这方面的工作,对拓宽氧化物薄膜的应用范围,解决传统红外薄膜材料环境稳定性、附着力差等问题,具有重要意义。本文针对离子束溅射制备的氧化物薄膜在中红外波段的特性,包括光学特性、微结构、环境稳定性等进行了较为系统的研究,并设计制备了中红外多层高反膜。具体研究内容包括以下几个方面:1.用离子束溅射方法制备了几种常用的单层氧化物薄膜,测试研究了薄膜的中红外光谱、光学常数、表面形貌、应力以及环境稳定性等特性。2.比较了色散模型拟合法和K-K变换方法这两种光学常数获取方法各自的特点和不足之处,将两种方法相结合,用拟合透射率代替光谱仪不能测试的波段范围,并通过改变K-K变换中被积函数的形式,有效提高了K-K方法的计算精度。3.设计并制备了中红外2.7μm及3.8μm反射膜,测试并分析了薄膜的光谱特性、断面结构特性以及退火特性。4.针对制备的高反膜膜厚不匹配问题,提出离子束溅射沉积速率随时间缓慢下降的假设,并分别通过SEM断面图像分析方法和透反射率拟合方法,来探索制备的高反膜中膜层厚镀随层数变化的规律,两种方法所得结果较为一致,理论计算的光谱和实测光谱的吻合程度也大大提高。
[Abstract]:The medium infrared 2-6 渭 m band is one of the main working bands of infrared detector and chemical laser. The optical thin film materials used in this band are mainly soft film materials such as fluoride, sulfide and selenide. Oxide has excellent mechanical properties and environmental stability, and has been widely used in visible near-infrared band to prepare high performance optical thin films. However, there are few reports on the research and application of oxides in the middle infrared band. The work in this field can broaden the application range of oxide thin films and solve the problems of environmental stability and poor adhesion of traditional infrared thin films. It is of great significance. In this paper, the properties of oxide thin films prepared by ion beam sputtering in the middle infrared band, including optical properties, microstructure, environmental stability and so on, have been systematically studied, and the middle infrared multi-layer high reaction films have been designed and prepared. The specific research contents include the following aspects: 1. Several common monolayer oxide thin films were prepared by ion beam sputter. The mid-infrared spectra, optical constant, surface morphology, stress and environmental stability of the films were measured and studied. The characteristics and shortcomings of dispersion model fitting method and K 鈮，
本文编号：2487129
[Abstract]:The medium infrared 2-6 渭 m band is one of the main working bands of infrared detector and chemical laser. The optical thin film materials used in this band are mainly soft film materials such as fluoride, sulfide and selenide. Oxide has excellent mechanical properties and environmental stability, and has been widely used in visible near-infrared band to prepare high performance optical thin films. However, there are few reports on the research and application of oxides in the middle infrared band. The work in this field can broaden the application range of oxide thin films and solve the problems of environmental stability and poor adhesion of traditional infrared thin films. It is of great significance. In this paper, the properties of oxide thin films prepared by ion beam sputtering in the middle infrared band, including optical properties, microstructure, environmental stability and so on, have been systematically studied, and the middle infrared multi-layer high reaction films have been designed and prepared. The specific research contents include the following aspects: 1. Several common monolayer oxide thin films were prepared by ion beam sputter. The mid-infrared spectra, optical constant, surface morphology, stress and environmental stability of the films were measured and studied. The characteristics and shortcomings of dispersion model fitting method and K 鈮，
本文编号：2487129
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