压电陶瓷作动器的纳米定位与跟踪控制方法研究

发布时间：2018-01-04 05:21

本文关键词：压电陶瓷作动器的纳米定位与跟踪控制方法研究　出处：《哈尔滨工程大学》2015年博士论文　论文类型：学位论文

【摘要】：随着纳米科学和纳米技术的飞速发展,在微电子、光纤通讯、精密加工等领域都迫切需要精度高、稳定性好的微纳米作动器。压电陶瓷作动器是一种理想的微作动器,具有相应速度快、分辨率高、无噪声、体积小、无摩擦等优点,因而逐渐成为精密制造装备中实现微观操作和加工的核心部件。然而压电陶瓷自身存在的复杂的迟滞特性等非线性,会严重影响压电陶瓷作动器纳米定位系统的优良性能,给其实际应用带来不便。此外,由于迟滞特性的存在,压电陶瓷作动器动力学系统含有数学模型很难精确描述的复杂动力学特性,造成压电陶瓷作动器的建模过程极其复杂,并且很难获得准确的模型参数,使得基于模型设计的逆模型控制策略增加了控制系统的复杂度,并且有可能会降低控制器的控制效果。针对上述问题,本论文对压电陶瓷作动器的纳米定位与跟踪控制问题进行理论研究与实验验证,主要研究内容可概括为:由于经典的滑模控制方法具有结构简单,实现容易,特别适合处理含有不确定性项的非线性系统控制问题等优点,成为目前在非线性系统中使用非常普遍和成熟的控制方法。因此在压电陶瓷作动器的控制中将压电陶瓷作动器看作二阶线性系统,通过系统模型辨识的方法得到模型的参数,而将迟滞特性以及二阶线性系统与实际非线性模型的误差看作系统的不确定性项,使用滑模控制算法进行鲁棒补偿。在传统的PD滑模面中加入一个积分环节,从而消除由震荡造成的稳态误差和提供一个光滑的控制。以压电陶瓷作动器的二阶简化模型为基础,分别设计了改进的滑模控制器和一个单输入-双输出的高增益观测器。提出的观测器能够通过位置测量信号估计出系统的全状态,所设计控制器的稳定性通过基于李亚普诺夫的方法进行了证明。由该方法得到的控制器一方面抑制了被当作系统扰动的迟滞特性所引起的非线性和模型误差等引起的系统不确定性,另一方面也利用观测到的全状态信息更好地实现了压电陶瓷作动器的控制,满足了压电陶瓷作动器上只存在一个位置传感器的制约条件,其有效性通过对设备平台进行实验的方式进行了验证。为了进一步提高控制器对于未建模动态和外界扰动的鲁棒性,本文结合鲁棒补偿的思想以及非线性滑模观测器的技术,在压电陶瓷作动器滑模控制器的基础上增加了对外界扰动和不确定性影响的补偿项,提出了基于滑模观测技术的压电陶瓷作动器鲁棒输出反馈控制方法,在一定程度上克服了高增益观测器的局限性,提高了控制器性能。该方法中的滑模观测器通过使用等效控制这一概念来进行设计,将观测器的所有状态在有限的时间内收敛到滑模面上,直到整个系统状态在有限的时间内被估计出来。观测到的估计值逼近真实值的有限时间收敛性通过基于李雅普诺夫的方法进行了证明。为验证该方法的有效性,同上将此控制器应用到压电陶瓷作动器纳米定位系统实验设备上,并对得到的实验数据进行了分析与讨论。上述基于模型的观测器通常受限要使用在系统模型精确已知的情况下,而由于各种未知的未建模动态和非线性特性难以通过数值模拟的方法进行精确的模拟,所以最终会降低定位与跟踪控制的精度。因此,为进一步提高输出反馈控制器的性能和稳定性,本文基于新出现的鲁棒误差符号积分控制方法,提出了一种压电陶瓷作动器非线性鲁棒输出反馈积分控制方法。该方法仍然以压电陶瓷作动器的二阶系统辨识模型为基础,首先设计了一个滤波辅助系统,根据李亚普诺夫稳定性分析的结果设计滤波后的误差信号和控制器结构,并对新误差信号的符号进行积分后得到不确定性与扰动补偿器的表达式。通过基于李雅普诺夫的方法可证明得到的控制器能够在使用输出反馈的情况下,对任意有界且二阶可微的参考信号实现半全局渐进跟踪,其包含的鲁棒补偿项对外界扰动和不确定性的逼近能力也同样得到了证明。为验证该方法的有效性,本文仍将其应用在系统实验设备上,并对实验数据进行了分析与比较。本文提出的上述三种控制方法的稳定性均为系统渐进稳定,所设计的控制算法取得了有益的实验结果。然而,目前已知动态系统的有限时间稳定性会提高系统的定位与跟踪精度、加快收敛速度并且对系统中的不确定性与额外扰动不灵敏。而终端滑模控制方法是一种变化的滑模控制方法,它可以达到有限时间内的稳定性。因此本文提出一种新的连续型有限时间终端滑模控制方法,它拥有全局有限时间稳定性。为了提高控制系统的鲁棒性,这里采用了一个滑模扰动观测器用来在有限的时间内估计系统中有界的不确定性和扰动。压电陶瓷作动器被看作一个二阶非线性系统进行设计控制器,迟滞特性被当作系统中的主要非线性并给出简单的迟滞模型以便获得更精确的仿真结果。类似的,该控制器的稳定性通过李亚普诺夫分析方法得到了证明。最后通过数值仿真对该方法的有效性进行了验证,得到了有益的结论。
[Abstract]:With the rapid development of nanoscience and nanotechnology in microelectronics, optical fiber communication, are in urgent need of the precision machining fields of high precision, good stability of the micro nano actuator. The piezoelectric ceramic actuator is an ideal micro actuator, with appropriate speed, high resolution, no noise, small volume no friction, etc., and gradually become the core part of the micro operation and precision machining in manufacturing equipment. However, the piezoelectric ceramic itself has complex nonlinear hysteresis characteristics, will seriously affect the performance of piezoelectric ceramic actuator for nano positioning system, for its practical application inconvenience. In addition, due to hysteresis the existence of complex dynamic characteristics of piezoelectric ceramic actuator dynamics system with mathematical model is difficult to accurately describe the cause of piezoelectric ceramic actuator modeling process is extremely complex, and it is difficult to obtain accurate. Type parameters, the inverse model control strategy based on model design and increase the complexity of the control system, and can reduce the performance of the controller. Aiming at the above problems, the dynamic positioning and tracking control problem of nano device was used for the theoretical and experimental study of piezoelectric ceramics, the main research contents can be summarized as follows: because the classical sliding mode control method has the advantages of simple structure, easy realization, especially suitable for processing nonlinear system control problems with uncertain terms, has become widely used and mature control method in nonlinear system. Therefore, the actuator control for the piezoelectric ceramic actuator is regarded as the two order linear system in piezoelectric ceramic, the model parameters obtained by system identification, and the hysteresis and the errors of two order linear system and nonlinear system model as the actual The uncertainty, using the sliding mode control algorithm for robust compensation. Join a integral part in PD traditional sliding mode surface, so as to eliminate the steady-state error caused by shock and provide a smooth control. The piezoelectric ceramic actuator two order simplified model as the foundation, designed a high gain observer with sliding mode the improved controller and a single input double output. The proposed observer can estimate the state of the system through the position measuring signal, based on Lyapunov's method is proved the stability of the designed controller. The system obtained by this method on one hand controller will be suppressed as hysteresis disturbance caused by nonlinear and the model error caused by uncertainty, on the other hand, using full state information to achieve better observation of piezoelectric ceramic actuator control, meet the pressure Piezoelectric ceramic actuator constraints a position sensor exists only on the device, its validity through the experiment of the equipment of the platform was verified. In order to further improve the controller robustness to unmodeled dynamics and external disturbances, combined with robust compensation idea and nonlinear sliding mode observer based sliding mode actuator technology the controller in the piezoelectric ceramic increased compensation effect on the external disturbance and the uncertainty of the proposed sliding mode observation technology of piezoelectric ceramic actuators based on robust output feedback control method, to a certain extent overcomes the limitations of high gain observer, improves the performance of the controller. The method of sliding mode observer by using the concept of equivalent control is designed, all state observer converge to sliding surface in finite time, until the entire system in the state The limited time are estimated. The observed estimate based on Lyapunov method is proved by finite time value approximation to the true value of the convergence. In order to verify the validity of the method, with the general controller is applied to the piezoelectric ceramic actuator nano positioning system experimental equipment, and the experimental data obtained are analyzed and discussed. The model of the observer is usually limited to use in case of precisely known system model based on the accurate simulation of unknown unmodeled dynamics and nonlinear characteristics is difficult by the method of numerical simulation, it will finally reduce positioning and tracking control precision. Therefore, in order to further improve the controller the performance and stability of output feedback, the emergence of new integral symbol error robust control method based on a piezoelectric ceramic actuator nonlinear robust Output feedback integral control method. This method is still in the piezoelectric ceramics two order system identification model of actuator as the foundation, we design a filter system, design error signal and the controller structure is filtered according to Lyapunov stability analysis results, and the new error signal symbols are not integral the uncertainty and disturbance compensator. The expressions can be used in the case of output feedback controller by Lyapunov method based on proven, bounded and two order differential reference signal to achieve semi global asymptotic tracking of arbitrary, the approximation ability of robust compensation term is included in the external disturbance and uncertainty are also obtained proved. To verify the validity of the method, this paper is applied in the experiment system, and the experimental data were analyzed and compared. The proposed The stability of three kinds of control methods for system stability, the designed control algorithm results are beneficial. However, the finite time stability known dynamic system will improve the system positioning and tracking precision, faster convergence speed and the uncertainty in the system with additional disturbance is not sensitive. And terminal sliding mode control method is a variation of the sliding mode control method, which can achieve the stability of limited time. So this paper puts forward a new type of continuous finite time terminal sliding mode control method, it has a global finite time stability. In order to improve the robustness of the control system, it uses a sliding mode disturbance observer is used to estimate the bounded system the uncertainties and disturbances in the limited time. The piezoelectric ceramic actuator is regarded as one of the two order nonlinear system controller design, the hysteresis is As a major in nonlinear system and hysteresis model gives a simple simulation in order to obtain more accurate results. Similarly, the stability of the controller is proved by Lyapunov analysis method. Finally, the numerical simulation on the effectiveness of the method are verified by some conclusions.

【学位授予单位】：哈尔滨工程大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TP273;TN384

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