太赫兹波高Q一维光子晶体腔与传感应用

发布时间：2018-01-04 18:27

本文关键词：太赫兹波高Q一维光子晶体腔与传感应用　出处：《中国计量学院》2015年硕士论文　论文类型：学位论文

【摘要】：近年来,太赫兹技术由于其在无损检测、成像、光谱及通信等方面的应用潜力,已引起学术界浓厚的研究兴趣。随着太赫兹波发射与探测技术的快速发展,许多新的应用在太赫兹波段有望实现。特别是对应用于太赫兹波段的功能器件如太赫兹波滤波器、光控或电控开关及调制器、高敏生化传感器等的需求不断增加,而具有高品质因子(Q值)的太赫兹波器件,在这些方面有重要的应用。论文提出了一种高Q一维光子晶体腔,对腔参数进行了优化,并研究了此高Q腔在可调谐的太赫兹波滤波器、光控太赫兹波开关及太赫兹波气体浓度折射率传感等方面的应用。论文主要研究工作分为三个部分:(1)设计并制作了一种高Q太赫兹波一维光子晶体腔。该光子晶体腔由两块分立且平行的布拉格镜及中间空气层作为缺陷层组成,每块布拉格镜由多片硅片和空气层交叠构成。利用传输矩阵理论研究了其透射特性,对腔参数进行了优化,并对制作的器件进行了性能测试。提出了通过增加缺陷层厚度(即腔长)来提高光子晶体腔Q值的方法。实验中获得的最高Q值为1.1×104,是目前同类器件国际报道中的最高值。通过控制平移台调节缺陷层厚度,实现了在299~355 GHz光子禁带内100%调谐的太赫兹波窄带带通滤波器。(2)根据光生载流子对太赫兹波的吸收作用,利用一维光子晶体腔设计了一种光控太赫兹波开关。因设计的一维光子晶体腔的缺陷层较长,激光可以很容易地照射到一维光子晶体腔中间层硅片上,此时仅需0.16 W/cm2的激光功率密度即可实现太赫兹波开关的关断操作,与单片光控太赫兹波开关相比所需的控制激光功率降低了50倍左右。(3)利用太赫兹波段高Q一维光子晶体腔首次在国际上实现了室温大气压下气体浓度折射率传感测量。实验中对氢气与空气的混合气体进行了检测,得到的最小可测折射率变化为1.4×10-5 RIU,氢气浓度的检测精度为6%,通过对光子晶体腔的进一步优化,性能有望至少提高一倍。此装置结构简单,灵敏度高且具有高的测量复现性及可靠性。
[Abstract]:In recent years, terahertz technology because of its imaging in nondestructive testing, and potential applications of spectrum and communication etc, has aroused strong interest in the study of academic circles. With the rapid development of THz emission and detection technology, many new applications is expected to achieve in the terahertz band. Especially for terahertz functional devices such as terahertz wave filter, optical switch and modulator or electronic control, Gao Min biochemical sensors such as increasing demand, and with high quality factor (Q value) of the terahertz devices have important applications in these fields. The paper presents a high Q one-dimensional photonic crystal cavity, the cavity parameters are optimized, and studied the in a high Q cavity tunable terahertz filter, optical switch and application of terahertz THz wave gas refractive index sensing and so on. The main research work is divided into three parts: (1) The design and fabrication of a high Q THz wave of one-dimensional photonic crystal cavity. The photonic crystal cavity is composed of two separate and parallel to the Prague mirror and middle air layer as a defect layer, each Prague mirror is composed of a plurality of silicon and air layer overlapping. To study the transmission characteristics using the transfer matrix theory of cavity parameters optimized, and the fabricated devices were tested. The proposed by increasing the thickness of defect layer (i.e. cavity length) method to improve the photonic crystal cavity. The highest Q value Q obtained a value of 1.1 * 104, is currently the international similar devices reported in the highest value. The thickness of the defect layer by adjusting control translation stage, realized in 299~355 GHz photonic band gap in narrowband terahertz wave 100% tunable band-pass filter. (2) according to the photocarrier absorption on the terahertz wave, using photonic crystal cavity design of a terahertz optical Zibo switch. Because of the defect layer in one-dimensional photonic crystal cavity long design, laser can easily be irradiated to the one-dimensional photonic crystal cavity intermediate layer on a silicon wafer, the laser power density can now only 0.16 W/cm2 to achieve terahertz switch off operation, and optical switch control compared to monolithic terahertz Zibo laser power required to reduce about 50 times. (3) by using the terahertz high Q photonic crystal cavity for the first time in the world to achieve rate sensing measurement of gas concentration index at room temperature under atmospheric pressure. The mixed gas of hydrogen and air in the experiment were detected, the minimum detectable change of refractive index is 1.4 * 10-5 RIU, the detection accuracy of hydrogen the concentration of 6%, through the further optimization of the photonic crystal cavity, the performance is expected to at least doubled. This device has the advantages of simple structure, high sensitivity and measurement reproducibility and high reliability.

【学位授予单位】：中国计量学院
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713;TP212

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