用于全自动引线键合设备的压电陶瓷线夹研究与设计

发布时间：2018-01-07 14:27

本文关键词：用于全自动引线键合设备的压电陶瓷线夹研究与设计　出处：《山东理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：在集成电路芯片与外部引线的连接方式中,引线键合技术是目前最广泛使用的技术之一。全自动引线键合机是半导体封装中一个关键的设备,如今我们生活中,不管是生活常用电子产品还是工业制造电子设备,体积都有越来越小的趋势,因此对全自动引线键合机键合的速度和精度提出了更高的要求,带来了更大的挑战。而引线线夹是引线键合设备中控制引线传送的关键部件之一。线夹的运动速度和张合量大小是影响线弧一致性的关键因素之一,并且也直接影响半导体芯片的键合质量和键合的效率。本文从分析现在市场上存在的不同驱动类型的线夹,选择了压电式驱动线夹。现在国内线夹主要使用的是压电叠层式线夹,在对比叠层压电陶瓷片和压电双晶片的优缺点后,选择了目前很少被研究的压电双晶片型线夹。主要的研究工作如下:1)分析压电陶瓷的一些基本特性以及一些重要的材料参数,根据引线线夹工作环境和要求,选择合适的压电致动器结构以及相适应的压电材料。根据选择的压电双晶片式致动器,确定恰当的振动模式、支撑方式以及压电双晶片的结构模式。2)通过对d型压电双晶片进行理论分析,总结了对压电双晶片驱动位移、驱动力、刚度以及固有频率的一些影响因素。主要是从压电双晶片长度、厚度以及宽度方面来考虑,分别分析了单个因素对驱动位移和固有频率等重要特性的影响。3)根据线夹基本要求,设计了压电双晶片式的线夹致动器结构,改良了一种电气连接方式,并且根据设计的致动器结构相应的设计了整个线夹装置。此外从驱动电源的电压放大、功率放大、RC放电回路以及外电路保护电路四个方面着手,设计了压电双晶片式线夹驱动板。4)利用ANSYS软件对致动器的位移和静态性能进行了仿真分析,制作了压电陶瓷驱动板、线夹致动器以及整个线夹装置试样,并进行了实验研究。仿真结果和实验测试结果都能满足线夹的基本使用要求,特别是对于线夹要求的驱动位移。设计的驱动板驱动压电陶瓷也能达到使用要求。
[Abstract]:In the connection mode between IC chip and external lead, lead bonding technology is one of the most widely used technologies at present. Automatic lead bonding machine is a key device in semiconductor packaging, and now we live in it. Both electronic products and industrial electronic equipment have a trend of becoming smaller and smaller in size, so the speed and precision of automatic lead bonding machine are required more and more. The lead clip is one of the key components in the lead bonding equipment to control the transmission of the lead. The speed of motion and the amount of tension of the clip are one of the key factors that affect the consistency of the wire arc. It also directly affects the bonding quality and bonding efficiency of semiconductor chips. Choose piezoelectric drive clamp. The main domestic clamp is the piezoelectric laminated clamp, after comparing the advantages and disadvantages of laminated piezoelectric ceramic and piezoelectric bimorph. The piezoelectric bimorph clamp, which is seldom studied at present, is selected. The main research work is as follows: 1) analyzing some basic properties and some important material parameters of piezoelectric ceramics. According to the working environment and requirements of the lead clamp, the suitable piezoelectric actuator structure and suitable piezoelectric material are selected. According to the selected piezoelectric bimorph actuator, the appropriate vibration mode is determined. Based on the theoretical analysis of d type piezoelectric bimorph, the driving displacement and driving force of piezoelectric bimorph are summarized. Some factors affecting stiffness and natural frequency are considered mainly in terms of the length, thickness and width of the piezoelectric bimorph. The influence of single factor on the driving displacement and natural frequency is analyzed. 3) according to the basic requirements of the clamp, the piezoelectric bimorph type actuator structure is designed and an electrical connection mode is improved. And according to the design of the actuator structure of the corresponding design of the entire clamp device. In addition, from the driving power supply voltage amplification, power amplifier RC discharge circuit and external circuit protection circuit four aspects. The piezoelectric bimorph clamp drive plate. 4) the displacement and static performance of the actuator are simulated and analyzed by using ANSYS software, and the piezoelectric ceramic drive plate is fabricated. The test results of the actuator and the whole device are studied. Both the simulation results and the experimental results can meet the basic requirements of the clamp. Especially for the drive displacement required by the clamp, the piezoelectric ceramic driven by the designed drive plate can also meet the requirements.
【学位授予单位】：山东理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405

【共引文献】