厚氧化硅平面波导芯片中高效转角镜的研究

发布时间：2018-01-10 05:33

本文关键词：厚氧化硅平面波导芯片中高效转角镜的研究　出处：《长春理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：目前基于PLC技术的大规模密集光交换器件正处在强烈的需求中,而氧化硅波导技术又是目前最成熟最有利于批量生产的PLC技术,所以带来最低的产品成本。据文献统计,其芯片上光学传输损耗及与光纤耦合损耗都最小,是科研与工程技术人员最看好的技术平台。因此,本论文系统分析了氧化硅波导PLC技术产品的优越性与发展状态,找出在这一平台上实现大规模光网络器件所面临的固有缺陷及必须解决的关键问题,有力地证明了本论文工作的必要性与意义。本论文中,我们结合了在硅基波导平台上对薄波导刻槽的成功经验、低折射率波导中全反射中较大的古斯-汉欣位移和氧化硅波导刻蚀加工的工艺特点,在氧化硅厚波导上刻蚀了21微米深槽以实现对导模的全反射。为方便实验测试,器件设计成了一对具有1输入3输出的波导转角镜结构,反射面大于波导界面,实验测试结果显示出了3个输出光斑,与设计目标基本一致。3个反射光斑的总光损耗约为21dB,所以每个反射镜光损耗为11dB。这一实验现象与结果为进一步优化器件结构提高反射效率奠定基础,也为实现大规模PLC器件增强了信心。根据调研,迄今为止尚未见到有类似工作及成功成果的报道。所以,这一工作既有力于实际产品的研制与开发,又显示了很高的学术意义,将促进大规模集成型光网络器件在氧化硅PLC平台上的更大发展,促进创新产品的开发与广泛应用,而且为光网络系统带来整体规模的推升。
[Abstract]:At present, the large-scale dense optical exchanger based on PLC technology is in a strong demand, and silicon oxide waveguide technology is the most mature and most conducive to mass production of PLC technology. Therefore, it brings the lowest product cost. According to literature statistics, the optical transmission loss and coupling loss between the chip and optical fiber are the smallest, which is the most favorable technology platform for researchers and engineers. This paper systematically analyzes the superiority and development status of silicon oxide waveguide PLC technology, and finds out the inherent defects and the key problems that must be solved to realize the large-scale optical network devices on this platform. In this paper, we combine the successful experience of thin waveguide grooves on silicon-based waveguide platform. The large Guss-Hanhin shift in the total reflection of low refractive index waveguides and the process characteristics of silicon oxide waveguide etching are discussed. 21 micron deep grooves have been etched on silicon oxide thick waveguides to achieve total reflection of guided modes. In order to facilitate the experimental test, a pair of waveguide angular mirrors with 1 input and 3 output have been designed. The reflection surface is larger than the waveguide interface. The experimental results show that three output spots are consistent with the design target. The total optical loss of the three reflection spots is about 21 dB. Therefore, the optical loss of each mirror is 11 dB. This experimental phenomenon and results lay the foundation for further optimizing the device structure to improve the reflection efficiency, and also enhance the confidence for the realization of large-scale PLC devices. So far, there have not been reports of similar work and successful results. Therefore, this work has not only made great efforts in the research and development of practical products, but also showed high academic significance. It will promote the development of large scale integrated optical network devices on silicon oxide PLC platform, promote the development and wide application of innovative products, and bring about an overall scale increase for optical network system.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN252;TN929.1

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