划片机的高精度运动定位及误差补偿

发布时间：2018-01-10 13:13

本文关键词：划片机的高精度运动定位及误差补偿　出处：《吉林大学》2015年硕士论文　论文类型：学位论文

【摘要】：随着科学技术的日益进步，半导体芯片已经成为电子信息产业的基础。半导体芯片生产的重要一道工序是由划片机来完成的，因此划片机的性能直接影响芯片的品质和产量。为了节约硅片原材料和提高芯片产量，硅片变得越来越薄,切口宽度越来越小，这些生产工艺的改进对划片机的性能提出了更高的要求。目前国内的划片机生产厂家较少而且技术水平也和国外先进设备有一定差距,所以提高划片机的性能对国内的电子产业有重要的意义。针对划片机目前存在的各种技术问题，本文选取划片机的高精度运动定位及误差补偿问题进行了研究。划片机的高精度运动定位系统选用伺服电机作为运动系统的驱动装置，利用光栅尺测量运动位移数据，，采用模糊PID控制算法，实现了运动系统的闭环控制要求。为了使运动系统的响应速度快、超调量小，必须根据设备具体情况对模糊数字PID参数进行调整，得到最优的参数值。本文利用MATLAB进行了仿真实验以验证模糊PID参数优化的效果。为了进一步提高运动定位精度，本文提出了两种误差补偿方法：模版补偿与标定补偿。模版补偿要求针对不同的产品分别进行定位误差扫描，然后记录相应误差并对实际生产时的运动控制参数做补偿修正。这种方法不依赖于划片机的运动定位精度而且适合各种尺寸不标准的芯片。标定补偿是先采用激光干涉仪对伺服电机的闭环控制误差进行辨识，然后利用数学方法建立定位误差模型，根据误差模型修正控制参数。标定补偿适合应用于芯片尺寸标准的情况。
[Abstract]:With the advances of science and technology, the semiconductor chip has become the foundation of electronic information industry. The semiconductor chip production is an important process of the dicing machine to complete, so the performance of chip dicing machine directly affects the yield and quality. In order to save raw materials and improve the yield of silicon chip, silicon wafers become thinner, kerf width more and more small, put forward higher requirements on the performance improvement of these production processes. The scriber scribing machine manufacturers at home less and the technical level of foreign advanced equipment and also have a certain gap, has important significance to improve the performance of the domestic electronics industry dicing machine.
For a variety of technical problems of dicing machine, high precision positioning and error compensation of the dicing machine were studied. The high precision positioning system dicing machine selection of servo motor as the driving device of the motor system, the grating measurement displacement data, fuzzy PID control algorithm is used to realize closed-loop motion system the control requirements. In order to make the response speed of motion of the system is fast, small overshoot, must adjust the fuzzy PID parameters according to the practical situation of the equipment to obtain the optimal values of the parameters. This paper uses the MATLAB simulation experiments are carried out to verify the effect of fuzzy PID parameter optimization.
In order to further improve the positioning precision, this paper presents two methods of error compensation and calibration template compensation. Template compensation requirements for different products were positioning error of scanning, and then record the corresponding error and compensation for the actual production of the motion control parameters. Dynamic positioning accuracy of this method does not depend on the dicing machine and the size is not suitable for all kinds of standard chip. Calibration is to use laser interference control instrument for closed-loop servo motor error identification, and then establish the error model using the mathematical method, according to the error correction model. The control parameters calibration compensation suitable for chip size standards.

【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305

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