面向电子制造的高速精密宏微运动平台减振研究与测试

发布时间：2018-01-12 08:18

本文关键词：面向电子制造的高速精密宏微运动平台减振研究与测试　出处：《广东工业大学》2015年硕士论文　论文类型：学位论文

【摘要】：随着电子制造业的高速发展,电子封装装备对其核心运动平台及系统提出了愈加苛刻的要求,要求实现高速、高加速度(10g-15g)运动条件下的微米级(1-3μm)精密定位。本文面向电子制造的高速精密运动平台开展研究,以高速、高精密定位等运动要求设计并搭建单轴宏微运动平台,开发集成控制系统,通过动力学建模和减振方法及相关实验,验证平台性能。本文的主要研究内容概括如下：1、深入调研高速精密运动平台的国内外研究现状,分析精密运动平台的关键技术及其存在的难点问题,确定本文的研究内容及研究重点。2、提出一种宏微复合驱动方案,即基于音圈电机的宏运动和基于压电陶瓷的微运动相结合,实现高速大行程精密定位的运动要求；提出一种双光栅尺复合定位方法,宏运动采用增量式光栅尺、微运动采用绝对式光栅尺的位置信号反馈方式,实现平台的精密定位；并设计出单轴宏微运动平台模型。3、对所设计的宏微运动平台进行功能设计和集成控制系统开发,实现电机、压电陶瓷、增量式光栅尺、绝对式光栅尺等信号的采集与运动控制集成。4、建立宏微运动平台的动力学模型,再利用MATLAB Simulink仿真工具对运动平台进行仿真分析；分析高速宏微运动平台的振动问题,提出基于压电陶瓷驱动器的主动减振方法。5、搭建宏微运动平台,开展宏微运动平台主动减振方法的实验研究,基于所开发的集成控制系统对平台的运动特性及精度进行分析测试。
[Abstract]:With the rapid development of electronic manufacturing industry, electronic packaging equipment has put forward more and more stringent requirements for its core motion platform and system, which requires the realization of high speed. High acceleration 10g-15g) precise positioning of micrometer scale 1-3 渭 m. In this paper, the high speed precision motion platform for electronic manufacturing is studied. High precision positioning and other motion requirements to design and build a single axis macro and micro motion platform, the development of integrated control system, through dynamic modeling and vibration reduction methods and related experiments. Verify the performance of the platform. The main research content of this paper is summarized as follows: 1, in-depth investigation of the domestic and foreign research status of high-speed precision motion platform, analysis of the key technology of precision platform and its difficult problems. Determine the research content and focus of this paper. 2, propose a macro and micro composite drive scheme, that is, the combination of macro motion based on voice coil motor and micro motion based on piezoelectric ceramics. The motion requirement of precision positioning with high speed and large stroke; A compound positioning method of double grating ruler is proposed. The macro motion adopts the incremental grating ruler and the micro motion adopts the absolute grating ruler position signal feedback to realize the precision positioning of the platform. And designed the uniaxial macro and micro motion platform model. 3, the design of the macro and micro motion platform function design and integrated control system development, the realization of motor, piezoelectric ceramics, incremental grating ruler. The acquisition and motion control of absolute grating ruler signal is integrated. 4, and the dynamic model of macro and micro motion platform is established. Then we use MATLAB Simulink to simulate and analyze the motion platform. The vibration problem of high speed macro and micro motion platform is analyzed. The active vibration reduction method based on piezoelectric ceramic actuator is proposed. The macro and micro motion platform is built and the experimental research on active vibration reduction method of macro and micro motion platform is carried out. Based on the developed integrated control system, the motion characteristics and accuracy of the platform are analyzed and tested.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN05

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