压缩式气压纳米压印振动的振源、传输及阻尼研究

发布时间：2018-01-12 22:32

本文关键词：压缩式气压纳米压印振动的振源、传输及阻尼研究　出处：《郑州大学》2016年硕士论文　论文类型：学位论文

【摘要】：自从集成电路技术被提出以来,作为其核心技术的光刻图形转移被广泛研究和应用。但由于光学光刻技术的分辨率受到瑞利公式的制约且成本急剧增加,国际半导体蓝图提出下一代图形转移技术的概念(NGL)。纳米压印技术是下一代图形转移的支撑技术。因其具有高分辨率、高保真度、高产量及低成本等技术特点,获得广泛关注。论文通过简单介绍纳米压印技术近年来的发展,对比了各种传统及新兴纳米压印技术的优缺点以及遇到的问题。在众多压印技术方法中气体施压纳米压印技术能很好地解决压印过程中施压压力不均匀的问题。面向气体施压工艺提出了压缩式气体施压纳米压印技术以满足应用需要。但是这种压印系统无可避免的会因活塞滑动而产生振动,从而影响压印图形转移分辨率。本文首先采用聚氨酯材料制作活塞环以保证施压腔室的气密性。通过赫兹接触理论分析接触面的宏观波纹度和微观粗糙度,得出振源振动参数。并进一步根据弹性力学方程数值分析得出振动在支杆和腔壁上的传输形态。为了求出振动叠加后的频率值、最大幅度值,通过理论分析得出压印系统振动在施压腔室底板上传递的振动方程,并通过仿真验证了理论分析的正确性。然后为了有效减弱系统振动对承片台的振动影响,选取硅胶作为减振装置材料。根据材料力学知识,分析振动原因及隔振原理,建立了强柱弱梁的减振结构模型。通过COMSOL软件仿真分析得出各参数的最优值,建立了2层强柱弱梁错开的最优减振结构,最大程度衰减了振动的幅值。最后基于课题组设计、研制的二代压缩式气压纳米压印机(APL-002),分析了活塞运动过程中对筒壁和支杆产生的振动。验证了振动在筒壁及支杆上传递时最大幅度基本保持不变的理论正确性。在此基础上研究了活塞滑动速度与活塞压缩量对振动幅度的影响,为接下来的实验研究提供了依据。
[Abstract]:Since the development of integrated circuit (IC) technology, lithography transfer, which is the core technology of IC, has been widely studied and applied. However, the resolution of optical lithography is restricted by Rayleigh formula and the cost increases rapidly. The international semiconductor blueprint puts forward the concept of next generation graphics transfer technology. Nanometer imprint technology is the support technology of next generation graphics transfer. Because of its high resolution and high fidelity. The characteristics of high production and low cost have attracted wide attention. This paper briefly introduces the development of nano-imprint technology in recent years. The advantages and disadvantages of various traditional and emerging nano-imprint techniques and the problems encountered are compared. Among the many imprint techniques, the gas pressure nano-imprint technology can solve the problem of uneven pressure in the process of imprint. In order to meet the needs of the application, the compressed gas pressure nano-imprint technology is proposed for the gas pressure process. However, this embossing system inevitably produces vibration due to the sliding of the piston. In order to influence the resolution of imprint pattern transfer. Firstly, the piston ring is made of polyurethane material to ensure the airtightness of the pressure chamber. The macroscopic corrugation and micro roughness of the contact surface are analyzed by Hertz contact theory. The vibration parameters of the vibration source are obtained, and the transmission form of the vibration on the supporting rod and the wall of the cavity is obtained according to the numerical analysis of the elastic mechanics equation. In order to obtain the frequency value after vibration superposition, the maximum amplitude value is obtained. The vibration equation of the embossing system on the bottom plate of the pressure chamber is obtained by theoretical analysis, and the correctness of the theoretical analysis is verified by simulation. According to the knowledge of material mechanics, the vibration cause and vibration isolation principle are analyzed. The vibration absorption structure model of strong column and weak beam is established. The optimum value of each parameter is obtained by COMSOL software simulation analysis, and the optimal vibration absorption structure with two stories strong column and weak beam stagger is established. The amplitude of vibration is attenuated to the maximum extent. Finally based on the design of the research group the second generation compression pressure nano-imprint machine APL-002 is developed. The vibration of cylinder wall and supporting rod during piston motion is analyzed, and the theoretical correctness of the maximum amplitude of vibration transfer on cylinder wall and rod is verified. The sliding velocity and movable piston are studied on the basis of this theory. The effect of plug compression on vibration amplitude. It provides the basis for the following experimental research.
【学位授予单位】：郑州大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN305.7

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