基于超快激光的超光滑光学表面制造技术研究

发布时间：2018-01-13 13:37

本文关键词：基于超快激光的超光滑光学表面制造技术研究　出处：《西安工业大学》2015年硕士论文　论文类型：学位论文

【摘要】：随着相关领域学科的发展,实现光学材料表面的超光滑抛光成为精密加工的一个重要研究内容。激光抛光技术作为一种表面处理技术,具有抛光效果好且热效应少的特点,所以相对于常规抛光技术而言,其在高精度抛光中具有无可比拟的优势。本文讨论了超快激光对光学材料的作用机理、抛光系统搭建、实验设计、实验实施和数据分析,并构建出了超快激光抛光石英晶体的动力学模型,探索了超快激光对石英晶体的抛光工艺。实验中,激光光源采用飞秒激光和皮秒激光,通过数码显微镜和表面轮廓仪检测了被抛光后的样品表面形貌和粗糙度,分析了激光能量密度、光斑重叠率及离焦量对超快激光抛光效果的影响。利用正交实验设计和单变量分析可以分别直观地分析各因素在抛光效果中所占的权重、各因素的水平变化对抛光效果的影响。将两种实验方法相结合可以对影响参数进行较为科学合理的优化,然后应用单变量及正交试验法对石英晶体进行直接抛光,最后对涂有牺牲层的材料样品进行了抛光试验,并且对两者的抛光效果进行了比较。本文的结论如下：1)推导出了超快激光作用光学材料的动力学模型公式,得出材料的刻蚀深度是随着激光能量密度的变化而呈非线性变化的。2)激光能量密度,光斑重叠率和离焦量这些工艺参数对抛光效果均有影响,这三者之间有着交互关系,存在一个可以获得最优抛光效果的参数组合。3)通过正交优化实验设计可以得出在激光能量密度,光斑重叠率和离焦量这三个主要参数中对抛光效果影响最大的是激光能量密度。因为激光能量密度的权重要大于其余两者的权重。4)对表面涂有牺牲层材料的石英晶体材料进行超快激光抛光,可以获得比直接抛光更好的抛光效果。
[Abstract]:With the development of related disciplines, to achieve ultra smooth surface polishing of optical materials become an important research content of precision machining. The laser polishing technology as a surface treatment technology, has the characteristics of good polishing effect and less thermal effect, compared to the conventional polishing technology, has the advantages of high precision polishing There is nothing comparable to this in the. This paper discusses the mechanism of ultrafast laser optical materials, polishing system construction, experimental design, experimental implementation and data analysis, and constructs the dynamic model of ultrafast laser polishing of quartz crystal, explores the ultrafast laser polishing process of quartz crystal. In the experiment, the laser light source using femtosecond and picosecond laser, through digital microscope and surface profiler to detect the surface morphology and roughness of the samples after polishing, analyzed the laser energy density, spot overlap and defocus Effect of ultrafast laser polishing effect. The analysis can respectively visually analyze the weight of each factor for the polishing effect of using orthogonal design and single variable influence level of each factor on the polishing effect. The two methods of combining optimization on parameters for more scientific and reasonable, and the application single variable and orthogonal test method for direct polishing of quartz crystal, with the final polishing test samples of sacrificial layer coating, and the polishing effect of the two are compared. The conclusions of this paper are as follows: 1) derived formula of dynamic model for ultrafast laser optical materials, the materials with etching depth the change of laser energy density and the nonlinear variation of.2) laser energy density, spot overlap and influence on the polishing effect are these parameters from the three focus. There is an interactive relationship between, one can obtain the optimal polishing effect parameters.3) through orthogonal experimental design can be obtained in the laser energy density, spot overlap and defocus of the three main parameters on the polishing effect is the largest laser energy density. Because the weight of the laser energy density of the right.4 important than the other two) with quartz crystal material sacrificial layer materials are ultrafast laser polishing on surface coating, can obtain better effect than polishing polishing directly.

【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249;TN305.2

【引证文献】