基于ZnO阵列的银表面二次电子发射抑制技术

发布时间：2018-01-15 23:17

本文关键词：基于ZnO阵列的银表面二次电子发射抑制技术　出处：《中国空间科学技术》2017年02期 　论文类型：期刊论文

【摘要】：随着卫星有效载荷的射频功率越来越大,传统的微放电抑制方法已经无法满足大功率卫星有效载荷的需求。降低大功率射频部件内表面的二次电子发射系数是抑制微放电效应的重要方法之一,通过在金属银表面构造纳米量级ZnO阵列,实现了纳米尺度银陷阱结构的制备,研究了晶种制备方式、锌盐浓度对ZnO阵列生长的影响。结果表明,采用紫外照射法制备晶种获得的ZnO阵列在样片表面分布均匀,提高锌盐浓度可改善ZnO阵列的分布均匀性。分析了ZnO阵列排列密度对银膜构筑的影响,发现在低密度的ZnO阵列上更加容易镀覆金属银。因此,获得了镀银表面基于ZnO阵列的陷阱结构制备的工艺技术,实现金属银表面二次电子发射系数最大值降低36.3%。
[Abstract]:The radio frequency power of satellite payload is increasing. The traditional micro-discharge suppression method can not meet the demand of high-power satellite payload. Reducing the secondary electron emission coefficient on the inner surface of high-power RF components is one of the important methods to suppress the micro-discharge effect. Nano-scale silver trap structure was prepared by constructing nanoscale ZnO arrays on the surface of silver metal. The effects of seed preparation and zinc salt concentration on the growth of ZnO arrays were studied. The ZnO arrays prepared by ultraviolet irradiation were distributed uniformly on the surface of the samples. The distribution uniformity of ZnO arrays can be improved by increasing the concentration of zinc salt. The influence of the arrangement density of ZnO arrays on the silver film construction is analyzed. It is found that it is easier to coat silver on the low density ZnO arrays. The technology of fabricating trap structure based on ZnO array on silver plated surface is obtained. The maximum emission coefficient of secondary electron on silver surface is reduced by 36.3%.
【作者单位】：西安交通大学电子与信息工程学院电子物理与器件教育部重点实验室;中国空间技术研究院西安分院空间微波技术重点实验室;陕西科技大学轻工科学与工程学院;
【基金】：国家自然科学基金(U1537211) 空间微波技术重点实验室基金(9140C530101130C53013,9140C530101140C53231)
【分类号】：TG174.4;TN304.21
【正文快照】： 网络出版地址:http:∥kns.cnki.net/kcms/detail/11.1859.V.20170321.1543.009.html引用格式:胡天存,曹猛,鲍艳,等.基于ZnO阵列的银表面二次电子发射抑制技术[J].中国空间科学技术,2017,37(2):54-60.HU T C,CAO M,BAO Y,et al.Technique for inhibiting secondary electron em

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