纳米位置控制系统的滤波器设计与实现

发布时间：2018-01-20 13:58

本文关键词： 纳米位置控制系统 FIR滤波器 IIR滤波器案例推理文化算法　出处：《沈阳建筑大学》2015年硕士论文　论文类型：学位论文

【摘要】：纳米定位技术是前沿科学、工程技术领域的关键技术之一。随着科学技术的发展,纳米定位技术现已广泛应用于航空航天、半导体工业、生物工程、医学等领域。纳米定位技术通常是以纳米位置控制系统的形式来实现,而对于纳米位置控制系统而言,由于噪声的存在,直接影响控制系统的控制精度。本文针对纳米位置控制系统的噪声,进行数字滤波算法设计仿真和实验研究。论文的主要工作如下：(1)介绍了纳米位置控制系统的滤波器设计的研究意义；介绍了国内外纳米位置控制系统及数字滤波器的研究和应用现状,说明我国针对纳米位置控制系统的滤波器设计的研究尚处于初始阶段。(2)对纳米位置控制系统的噪声来源进行分析。首先从硬件和软件两方面介绍了纳米位置控制系统的整体结构构成。其次,确认控制系统的噪声主要来源于信号采集系统和机械结构本身。最后对噪声进行特性分析,得出采集系统的噪声为高频噪声,需要设计采用数字低通滤波器滤除,机械结构本身噪声为特定频率噪声,需要设计采用数字带阻滤波器滤除。(3)设计数字低通滤波器和数字带阻滤波器算法并进行MATLAB仿真实验。对比传统FIR滤波器和IIR滤波器幅频特性和相频特性,通过大量MATLAB仿真实验研究,最终确定数字低通滤波器采用FIR汉明窗型,滤波阶数为110阶；数字带阻滤波器采用基于案例推理一文化算法的FIR优化滤波器,滤波阶数为124阶。(4)对所设计的数字滤波器算法在纳米位置控制平台中进行实验研究。在纳米位置控制系统上位机监控软件中采用混合编程的方式设计系统上位机滤波器功能界面,对混有噪声的阶跃响应信号进行实际滤波实验,结果表明,通过数字低通滤波器和数字带阻滤波器两次滤波后,噪声被成功滤除,说明了本文设计的滤波算法的有效性。综上所述,本文主要对纳米位置控制系统的滤波器算法进行了研究,实验结果表明了所提算法的可行性,有效保证了系统的定位精度。纳米位置控制系统的滤波器设计的提出,对相关类似系统的滤波器算法设计具有一定的借鉴价值。
[Abstract]:With the development of science and technology, nano-positioning technology has been widely used in aerospace, semiconductor industry, biological engineering. In medicine and other fields, nano-positioning technology is usually realized in the form of nano-position control system, but for nano-position control system, because of the presence of noise. The control accuracy of the control system is directly affected. This paper aims at the noise of the nanometer position control system. The main work of this paper is as follows: 1) introduce the significance of the filter design of the nanometer position control system; The research and application of nanometer position control system and digital filter at home and abroad are introduced. It shows that the study of filter design for nanometer position control system in China is still in the initial stage. The noise source of the nanometer position control system is analyzed. Firstly, the whole structure of the nanometer position control system is introduced from the aspects of hardware and software. Secondly, the structure of the nanometer position control system is introduced. It is confirmed that the noise of the control system mainly comes from the signal acquisition system and the mechanical structure itself. Finally, the characteristics of the noise are analyzed, and it is concluded that the noise of the acquisition system is high frequency noise. It is necessary to design a digital low-pass filter for filtering, and the noise of the mechanical structure itself is a specific frequency noise. Need to design digital band-stop filter to filter. The algorithms of digital low-pass filter and digital band-stop filter are designed and simulated by MATLAB. The amplitude-frequency and phase-frequency characteristics of FIR filter and IIR filter are compared with those of traditional FIR filter and IIR filter. Through a large number of MATLAB simulation experiments, it is determined that the digital low-pass filter adopts the FIR hamming window type, and the filter order is 110th order. The digital band-stop filter adopts FIR optimized filter based on case-based reasoning and cultural algorithm. Filter order 124. The design of digital filter algorithm in the nano-position control platform for experimental research. In the nano-position control system in the host computer monitoring software using a hybrid programming method to design the system upper computer filter functional interface. The experimental results show that the noise is filtered successfully by digital low-pass filter and digital band-stop filter. To sum up, the filter algorithm of nanometer position control system is mainly studied in this paper, and the experimental results show the feasibility of the proposed algorithm. The proposed filter design of the nanometer position control system has certain reference value for the filter algorithm design of the related similar system.
【学位授予单位】：沈阳建筑大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP273;TN713

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