激光微加工的抛光参数数学建模分析

发布时间：2018-01-22 15:50

本文关键词： 激光微加工抛光参数数学建模　出处：《激光杂志》2017年08期 　论文类型：期刊论文

【摘要】：当前抛光参数数学建模分析方法精度低,建立新激光微加工的抛光参数数学模型,通过数学模型对沟壑的形成原理进行数学建模,获取不同抛光工艺参数对表面激光微加工质量影响的规律,为获取最佳抛光参数组合提供理论依据。选用157 nm激光对表面进行抛光实验,通过最小二乘法求出不同轮廓中线的所有系数,获取轮廓中线的方程,将采样点与轮廓中线绝对值的算数平均值作为粗糙度值,建立粗糙度数学模型。通过激光光斑面积对作用于表面的激光能量密度进行描述,建立激光光斑面积数学模型。实验结果表明,所提模型精度很高。
[Abstract]:At present, the precision of mathematical modeling and analysis method of polishing parameters is low. The mathematical model of polishing parameters of new laser micromachining is established, and the formation principle of gully is modeled by mathematical model. The effects of different polishing parameters on the surface laser micromachining quality were obtained, which provided the theoretical basis for obtaining the best polishing parameters. The surface polishing experiments were carried out with 157nm laser. By using the least square method, all coefficients of the midline of different contours are obtained, the equations of the midline of the contour are obtained, and the mean value of the absolute value of the sampling point and the midline of the contour is taken as the roughness value. The mathematical model of laser spot area is established by describing the laser energy density acting on the surface. The experimental results show that the proposed model has high accuracy.
【作者单位】：郑州大学西亚斯国际学院文理学院;
【基金】：江西省高校人文社会科学研究青年基金项目(XW1505)
【分类号】：TN249
【正文快照】： 当前抛光技术通常适于低精度抛光,不能实现小范围高精度抛光,而激光抛光恰好能够实现,可对材料进行塑性或类塑性去除,降低表面粗糙度,在精密微加工中有明显的优势。因此,分析表面激光微加工的抛光参数数学建模具有重要意义[1-3]。文献[4]提出依据COMSOL软件的多物理场对称瞬态

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