S波段窄带带通体声波滤波器设计

发布时间：2018-01-24 03:50

本文关键词： 体声波滤波器薄膜体声波谐振器变迹电极声-电磁协同仿真布局　出处：《强激光与粒子束》2017年11期 　论文类型：期刊论文

【摘要】：针对无人机测控应用设计了一种S波段窄带带通体声波(BAW)滤波器,其技术指标为:中心频率2.46 GHz,带宽41 MHz,带内插损大于-3 d B,带内纹波小于1 d B,带外抑制小于-40 d B@2.385 GHz和2.506 GHz。采用Mason模型设计了BAW滤波器中各薄膜体声波谐振器(FBAR)的叠层结构;使用变迹法设计了各FBAR(电极)的形状;采用一种自行开发的自动布局方法得到紧凑的BAW滤波器布局;建立了BAW滤波器的声-电磁协同仿真模型,通过这种高保真的多物理场仿真方法对设计结果进行了性能验证。该设计流程是通用的,并且有两个特点:采用声-电磁协同仿真方法对设计阶段的BAW滤波器进行最终性能检验,可以及早发现并拒绝1D Mason模型过于乐观的设计;滤波器布局设计中采用了一种新的自动化布局方法,大大简化了在此阶段的反复尝试工作,也为声-电磁协同仿真模型输出了必需的面内结构信息。
[Abstract]:A S-band narrowband all-body acoustic wave filter (BAW) is designed for UAV measurement and control applications. Its technical specifications are as follows: central frequency 2.46 GHz, bandwidth 41 MHz. The band insertion loss is greater than 3 dB and the band ripple is less than 1 dB. The out-of-band suppression is less than -40 dB @ 2.385 GHz and 2.506 GHz. The thin film bulk acoustic resonator in the BAW filter is designed by using the Mason model. The laminated structure; The shapes of FBARs are designed by using the method of apodization. The compact BAW filter layout is obtained by using a self-developed automatic layout method. The acoustic-electromagnetic cooperative simulation model of BAW filter is established, and the design results are verified by this high-fidelity multi-physical field simulation method. The design flow is universal. And there are two characteristics: using acoustic-electromagnetic cooperative simulation method to test the final performance of the BAW filter in the design stage can find and reject the over-optimistic design of 1D Mason model as early as possible; A new automatic layout method is adopted in the filter layout design, which greatly simplifies the repeated attempts at this stage and outputs the necessary in-plane structure information for the acousto-electromagnetic cooperative simulation model.
【作者单位】：中国工程物理研究院电子工程研究所;中国科学院高能物理研究所核探测与核电子学国家重点实验室;西南科技大学信息工程学院;
【基金】：国家自然科学基金项目(61574131) 中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001) 西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14ZXTK01)
【分类号】：TN713
【正文快照】： 随着全球无线通信市场的发展,射频前端产品的需求量急剧上升。滤波器作为射频前端的核心器件,对推动新一代5G通信标准的发展、个人移动终端的小型化和多功能化有着重要的意义。基于压电薄膜材料的体声波(BAW)滤波器,具有陡峭的滤波曲线、低插入损耗和优良的带外抑制能力[1],因

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