聚合物微流控芯片的制造方法研究

发布时间：2018-02-04 23:55

本文关键词： 聚合物微流控芯片被动式微混合器 CO_2激光正交试验热键合混合效率　出处：《辽宁工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：微流控芯片(Microfluidic Chip)是一种能完成样品的检测和输出过程的微结构集成的器件,是微流控技术的主要平台。在原材料方面,相较于石英、硅和玻璃基晶片,聚合物微流控芯片是一种经济的替代品,并且由于聚合物种类繁多,所以可以根据不同的工作环境选用不同的聚合物。微混合器是微流控芯片中的一个重要组件,其在生物化工领域有着广泛的应用。微混合器可以大致分为主动和被动微混合器。被动式微混合器是一种不借助外部能量,只通过内部结构就可以对液体溶液进行混合的微器件。并且随着微流道结构设计的多种多样,芯片制造加工技术变得尤为重要。为此,本文对CO_2激光加工两种聚合物的工艺参数以及微混合器的设计、仿真和实验进行了研究。主要内容如下:(1)通过对CO_2激光加工聚对苯二甲酸乙二醇酯(PET)和聚甲基丙烯酸甲酯(PMMA)的加工试验,利用正交实验方法研究了激光功率、扫描速度、通道长度和加工次数四种工艺参数对聚合物微通道成形质量的影响。(2)通过对两种聚合物材料的试验确定了其工作温度。研究了经过改进后的四层PMMA微稀释器芯片的热键合参数,获得了键合温度、压力、时间之间的关系。解决了热键合实验中出现的微通道错位和芯片上下层之间堵塞的问题。(3)设计了菱形微柱、F型、E型、SESM和FESM共五种微混合器。利用人工神经网络的方法对混合单元中的菱形微柱的形状进行优化,并且测定了其出口处的混合效率。然后,利用流体仿真软件对F型、E型、SESM和FESM的微混合器通道内部的流体混合行为状态进行了可视化的解释。(4)利用加工设备制作了F型、E型、SESM和FESM这四种微混合器,并且研发了适合八层SESM芯片的热键合工艺。最后,利用酚酞溶液和氢氧化钠溶液的混合特性获得了四种微混合器在不同雷诺数下的混合效率。本文研究了CO_2激光参数对聚合物微通道质量的影响。同时确定了多层PMMA芯片热键合的温度、压力、时间参数之间的关系。然后,利用微流体的混合原理设计了五种微混合器,并对它们的混合性能进行了评价。
[Abstract]:Microfluidic Chip is a kind of microstructural integrated device which can complete the process of sample detection and output. It is the main platform of microfluidic technology. Compared with quartz silicon and glass-based chips polymer microfluidic chips are an economical alternative and because of the variety of polymers. Therefore, different polymers can be selected according to different working environment. Micromixer is an important component in microfluidic chip. Micromixers can be divided into active and passive micromixers. Passive micromixers are passive micromixers without external energy. Microdevices that can mix liquid solutions only through internal structures, and with the variety of microchannel structures, chip manufacturing and processing technology has become particularly important. In this paper, the process parameters of CO_2 laser processing of two kinds of polymers and the design of micromixer are discussed. The main contents are as follows: (1) CO_2 laser processing of polyethylene terephthalate (PET) and poly (methyl methacrylate) (PMMA). The laser power and scanning speed are studied by orthogonal experiment. The influence of four process parameters on the forming quality of Polymer Microchannel. The working temperature of two kinds of polymer materials was determined by experiments, and the thermal bonding parameters of the improved four-layer PMMA microdiluter chip were studied. The relationship among bonding temperature, pressure and time is obtained. The problem of microchannel dislocation and blockage between the upper and lower layers of the chip is solved. There are five kinds of micromixers in SESM and FESM. The shape of the diamond microcolumn in the mixing unit is optimized by artificial neural network method, and the mixing efficiency at its outlet is measured. Using fluid simulation software, the fluid mixing behavior in the channel of FESM and SESM is visualized. SESM and FESM are four kinds of micromixers, and a hot bonding process suitable for eight-layer SESM chip has been developed. Finally. The mixing efficiency of four kinds of micromixers at different Reynolds numbers was obtained by using the mixing characteristics of phenolphthalein solution and sodium hydroxide solution. The influence of CO_2 laser parameters on the quality of polymer microchannel was studied. The temperature of thermal bonding of multilayer PMMA chip is discussed. The relationship between pressure and time parameters. Then, five kinds of micromixers are designed by using the mixing principle of microfluid, and their mixing performance is evaluated.
【学位授予单位】：辽宁工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN492

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