微波等离子体光源高效率射频功率放大器研究

发布时间：2018-02-05 03:19

本文关键词： 微波等离子体光源功率放大器大功率 F类谐波控制　出处：《电子科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：为适应当今能源短缺,倡导高效节能的现状,人们对于绿色、节能、高效率的新型微波等离子体光源(LEP)的研究日趋活跃。本文课题在第一代微波等离子体光源研究基础上,利用现在高速发展的微波固态电路替代真空器件作为驱动源,解决第一代微波等离子体光源诸多缺点,实现可用于工程应用的新型微波光源。重点研究新型微波等离子体光源射频模块中功率放大器的设计,针对高效率、大功率的实现做大量研究分析,最终实现高效率的大功率功放设计。文章主要研究内容分为四部分。文中首先通过介绍课题研究背景,对研究对象设计方法与功率器件的发展现状做详细介绍。其次,对功率放大器的基本类型、技术指标、研究设计方法进行理论分析研究,文中详细阐述功率放大器中负载牵引方法以及非线性方法,重点对如何实现高效率和F类功率放大器进行理论分析。再次,分析微波等离子体光源设计目标,以LDMOS功率管作为设计基础,利用ADS仿真软件对Freescale公司大功率功率管MRF6V4300N进行仿真研究,并制作、调试出实物实现250W大功率、60%以上高效率的功率放大器。文章对设计过程做详细分析并对调试中注意事项以及所遇问题的解决方法进行阐述。然后,文中针对如何提高效率做仿真研究,利用MRF6V4300管加入谐波控制设计,实现200W输出功率、74%效率的F类功率放大器。最后,对论文过程中所存在的不足之处进行总结分析,并对不足之处提出改进意见。同时,针对微波等离子体光源射频模块的设计,给未完成的工作指出方向与可借鉴的方案。本文研究方案可行性大,实现了可用于微波等离子体光源工程应用的微波功率放大器模块,并指出工程应用中设计关键点与注意事项。通过对两种设计方案电路的仿真和测试,实现了大功率、高效率的设计目标,对后来研究者具有较大的参考价值。
[Abstract]:In order to adapt to the current energy shortage and advocate the current situation of efficient energy conservation, people for green, energy-saving. The research of new microwave plasma source (LEP) with high efficiency is becoming more and more active. This paper is based on the first generation of microwave plasma light source. In order to solve many shortcomings of the first generation microwave plasma light source, the microwave solid-state circuit is used to replace the vacuum device as the driving source. The design of the power amplifier in the RF module of the new microwave plasma light source is studied, and a lot of research and analysis on the realization of high efficiency and high power are done. Finally, the design of high-power amplifier with high efficiency is realized. The main content of this paper is divided into four parts. Firstly, the research background is introduced. The research object design methods and the development of power devices are introduced in detail. Secondly, the basic types of power amplifiers, technical specifications, research and design methods are analyzed and studied theoretically. In this paper, the load traction method and nonlinear method in power amplifier are described in detail. The emphasis is on how to achieve high efficiency and class F power amplifier. Thirdly, the design target of microwave plasma light source is analyzed. Based on the design of LDMOS power tube, the MRF6V4300N of Freescale company is simulated and studied by using ADS simulation software, and it is made. In this paper, the design process is analyzed in detail, and the matters needing attention in debugging and the solutions to the problems encountered are expounded. In this paper, how to improve the efficiency of simulation research, using MRF6V4300 tube to add harmonic control design to achieve 200W output power efficiency of 74% F power amplifier. Finally. The shortcomings of the paper are summarized and analyzed, and the improvement suggestions are put forward. At the same time, the design of RF module of microwave plasma light source is proposed. In this paper, the feasibility of the research scheme is great, and the microwave power amplifier module which can be used in the microwave plasma source engineering application is realized. The design key points and points for attention in the engineering application are pointed out. By simulating and testing the circuits of the two design schemes, the design goal of high power and high efficiency is realized, which is of great reference value to the later researchers.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN722.75

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