光波导环形谐振腔生化液体传感器的研究

发布时间：2018-02-14 03:57

本文关键词： 聚合物光波导环形谐振腔生化传感器葡萄糖浓度　出处：《电子科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：光学生化传感器通过将信息的采集与传输放在光域进行从而可有效的避免外界电磁场干扰,具有探测信号稳定可靠等优点,并可实现远距离监控下的现场检测,因此受到人们的广泛关注。光学生化传感器就工作原理不同主要分为荧光型与倏逝波型,其中倏逝波型由于可通过引入集成光波导技术以及各种光学干涉结构从而具有高灵敏度、多功能、微型化等特征,此外,其制作工艺与当前成熟的微电子工艺相兼容,因此成为了目前研究的重点。光波导环形谐振腔结构紧凑,设计灵活,可实现较高的品质因数,将其用于生化传感器除了能够实现光学传感器的各种优点外,还能够获得较高的灵敏度,因此研究基于光波导环形谐振腔的生化传感器具有非常重要的意义。鉴于此,本文以聚合物为光波导材料,以葡萄糖的浓度检测为目标,研究了基于双模干涉仪(Two-mode Interferometer,TMI)的聚合物光波导环形谐振腔生化传感器的设计、制作及相关传感测试技术。本文主要的工作及成果如下。(1)根据选定的聚合物材料,利用有效折射率方法、马卡梯里方法对构成环形谐振腔的单模以及双模矩形光波导进行了分析设计,同时对器件可检测的溶液折射率范围进行了研究;进一步结合耦合模理论对构成环形谐振腔的TMI的参数进行了设计分析。(2)介绍了环形谐振腔的基本结构和主要特征参数;对环形光波导的弯曲损耗的计算,并结合环的光传输特性分析设计了环形谐振腔的参数。(3)根据环形谐振腔的设计参数,设计并通过外协加工制作了相应的光刻掩模版;研究了光刻、磁控溅射镀膜、感应耦合离子刻蚀(Inductively Coupled Plasma,ICP)等器件制作工艺并成功的制备了较好侧壁垂直度且表面光滑度较好的聚合物光波导环形谐振器。(4)搭建高精度光学测试平台,建立测试流程,对制作固定上包层的环形谐振器进行通光测试以及相应的谐振特性的测试,可获得的最大波长隔离度18 d B;对四种浓度的葡萄糖溶液进行了传感测试,对器件的传感特性以及灵敏度进行分析,通过不断地优化实验过程中的工艺参数,器件的探测极限可达到3.8×10-4 RIU。
[Abstract]:The optical biochemical sensor can effectively avoid the external electromagnetic field interference by collecting and transmitting the information in the optical domain. It has the advantages of stable and reliable detection signal, and can realize the field detection under remote monitoring. Therefore, people pay more attention to it. Optical and biochemical sensors are mainly divided into fluorescent and evanescent wave types. Evanescent wave patterns can be characterized by the introduction of integrated optical waveguide technology and various optical interference structures, such as high sensitivity, multifunction, miniaturization, etc. In addition, the fabrication process of evanescent wave type is compatible with the current mature microelectronic technology. Therefore, the optical waveguide ring resonator is compact in structure, flexible in design, and can achieve high quality factor. In addition to the various advantages of optical sensor, the optical waveguide ring resonator can be used in biochemical sensors. Therefore, it is of great significance to study biochemical sensors based on optical waveguide ring resonator. In view of this, the polymer is used as optical waveguide material and the concentration of glucose is measured as the target. The design, fabrication and related sensing test techniques of polymer optical waveguide ring resonator biochemical sensor based on Two-mode Interferometer TMI (TMI) are studied. The main work and results of this paper are as follows: 1) based on the selected polymer materials, Using the effective refractive index method and the Makatiri method, the single-mode and two-mode rectangular optical waveguides are analyzed and designed, and the range of the refractive index of the solution can be detected by the device is studied. The basic structure and main characteristic parameters of the ring resonator are introduced, and the bending loss of the ring optical waveguide is calculated. According to the design parameters of ring resonator, the photolithographic mask plate is designed and fabricated by external coprocessing, and the photolithography and magnetron sputtering coating are studied. Inductively Coupled Plasma-ICP) was fabricated by inductively coupled ion etching, and a polymer optical waveguide ring resonator with good side wall perpendicularity and good surface smoothness was successfully fabricated. A high-precision optical testing platform was built and the test flow was established. The maximum wavelength isolation is 18 dB for the ring resonator with fixed cladding, and the corresponding resonance characteristics are tested. Four glucose solutions with different concentrations are tested. The sensing characteristics and sensitivity of the device are analyzed. The detection limit of the device can reach 3.8 脳 10 ~ (-4) RIU by continuously optimizing the process parameters during the experiment.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN252;TP212

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