高精度激光差动共焦大曲率半径测量关键技术研究

发布时间：2018-02-16 09:18

本文关键词： 差动共焦曲率半径测量光学设计机械设计　出处：《北京理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：在现代光学测量领域中，曲率半径是光学透镜最基本的参数之一，其精度将直接影响透镜的焦距、像差等光学参数，进而影响光学系统的综合性能。因此，，高精度的曲率半径测量一直以来都是光学测量领域的一个难题。特别是在航天相机、光刻机物镜等高性能光学系统中，其对透镜表面曲率半径的测量精度提出了越发严格的要求。为解决透镜曲率半径的高精度测量难题，我们曾提出一种激光差动共焦曲率半径高精度测量方法。该技术基于差动共焦探测系统的轴向光强响应绝对零点精确对应差动共焦探测系统物镜聚焦焦点这一特性，利用差动共焦探测系统轴向光强响应曲线的过零点精确瞄准定位被测透镜的猫眼位置和共焦位置，并利用测长激光干涉仪精确测得这两点之间的距离，继而实现曲率半径的高精度测量。与已有的曲率半径测量方法相比，该方法结构简单、定焦灵敏度高、抗环境干扰能力强。本论文基于所提出的差动共焦曲率半径测量方法，针对大曲率半径测量需求，开展了系统关键元件的设计、光路的搭建、测量仿真、误差分析等研究工作。论文的主要研究内容包括： 1）曲率半径测量原理分析：基于差动共焦层析成像特性，以及其对物镜焦点的精确捕获能力，研究差动共焦曲率半径测量原理，设计差动共焦曲率半径测量方法，分析像差、调整偏差对曲率半径测量结果的影响。 2）差动共焦曲率半径测量系统的光学系统研究：在光学设计仿真软件Zemax中建立系统仿真模型，确定系统各光学元件参数以及系统的外形尺寸，完成系统中关键器件焦距为4.5m准直镜的设计，分析分光棱镜在会聚光路中对测量结果的影响。 3）系统的机械结构设计：在机械设计软件Solidworks中完成系统的机械结构设计，包括各光学元件的固定结构、系统测量的调整结构以及整个系统的装配。 4）实验验证及误差分析：验证原理方法的正确性与可行性，并对该系统中可能存在的误差源进行了分析。初步实验结果表明，该系统测量精度高，单透镜曲率半径测量相对误差小于7ppm。该技术的研究为透镜曲率半径的测量提供了有效的方法，可解决目前较大曲率半径高精度测量的难题。
[Abstract]:In the field of modern optical measurement, the radius of curvature is one of the most basic parameters of optical lens. Its precision will directly affect the optical parameters such as focal length, aberration and so on, and then affect the comprehensive performance of optical system. High precision curvature radius measurement has always been a difficult problem in the field of optical measurement, especially in high performance optical systems such as space camera, lithography objective lens, etc. The precision of measuring curvature radius of lens surface is more and more strict. In order to solve the problem of measuring the curvature radius of lens with high precision, We have proposed a high precision method for measuring the radius of laser differential confocal curvature. This technique is based on the characteristic that the axial intensity response of the differential confocal detection system corresponds to the focusing focus of the objective lens of the differential confocal detection system exactly at 00:00. The position of cat's eye and the position of confocal of the measured lens are accurately located by using the axial intensity response curve of the differential confocal detection system at 00:00, and the distance between these two points is accurately measured by using the length measuring laser interferometer. Compared with the existing curvature radius measurement methods, this method is simple in structure, high in focusing sensitivity and strong in resisting environmental interference. This paper is based on the proposed differential confocal curvature radius measurement method. In order to meet the need of large curvature radius measurement, the design of key components of the system, the construction of optical path, the measurement simulation, the error analysis and so on are carried out. The main contents of this paper are as follows:. 1) the principle of curvature radius measurement: based on the characteristics of differential confocal tomography and its ability to capture the objective focus accurately, the principle of differential confocal curvature radius measurement is studied, the method of differential confocal curvature radius measurement is designed, and the aberration is analyzed. The effect of the adjustment deviation on the measurement results of curvature radius. 2) the optical system of differential confocal curvature radius measurement system: the system simulation model is established in the optical design simulation software Zemax, and the parameters of the optical components and the system shape are determined. The design of the key device focal length 4.5m collimation mirror is completed, and the influence of the splitter prism on the measurement results in the convergent optical path is analyzed. 3) Mechanical structure design of the system: the mechanical structure design of the system is completed in the mechanical design software Solidworks, including the fixed structure of each optical element, the adjusting structure of the system measurement and the assembly of the whole system. 4) Experimental verification and error analysis: the correctness and feasibility of the principle and method are verified, and the possible error sources in the system are analyzed. The preliminary experimental results show that the measurement accuracy of the system is high. The relative error of single lens curvature radius measurement is less than 7 ppm.The research of this technique provides an effective method for lens curvature radius measurement and can solve the problem of large curvature radius and high precision measurement.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH744.5

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