石英光学元件激光损伤修复形貌的优化

发布时间：2018-02-26 05:32

本文关键词： 激光技术激光损伤修复时域有限差分法瑞利-索末菲衍射积分　出处：《中国激光》2016年06期 　论文类型：期刊论文

【摘要】：针对三倍频光学元件后表面的损伤修复形貌,分别采用时域有限差分法(FDTD)和瑞利-索末菲(R-S)衍射积分法,来模拟不同形貌下元件修复区域内以及其后续的光场分布。结果表明,当修复坑截面轮廓线端点切线与光束传播方向夹角大于70°时,元件内部光强极大值小于1.66,修复效果优于其他角度。夹角为70°、宽200μm的抛物面型、圆锥型和圆台型凹坑的后续光强极大值小于1.46。但是当修复坑宽度较大如达到1mm时,圆台型凹坑的后续光强极大值高达9.31,且作用区间长。因此,考虑实际激光修复工艺的难度,夹角大于70°的圆锥型凹坑是石英元件后表面损伤修复的首选形貌。
[Abstract]:In view of the damage repair morphology of triple-frequency optical elements, FDTD and Rayleigh Sommerfeld R-S diffraction integration methods were used to simulate the light field distribution in the repair region and its follow-up under different morphologies, respectively, using FDTD and Rayleigh Sommerfeld diffraction integration method. When the angle between the end tangent of the profile of the repairing pit section and the direction of beam propagation is greater than 70 掳, the maximum of light intensity inside the element is less than 1.66, and the repair effect is superior to that of other angles, which is a paraboloid with an angle of 70 掳and a width of 200 渭 m. The maximum value of subsequent light intensity of conical and platform type cones is less than 1.46.However, when the width of repairing pit is larger than 1 mm, the maximum value of subsequent light intensity of conical pit is up to 9.31, and the range of action is long. Therefore, the difficulty of practical laser repair technology is considered. Conical pits with an angle greater than 70 掳are the preferred morphology for surface damage repair of quartz elements.
【作者单位】：中国科学院上海光学精密机械研究所高功率激光物理联合实验室;中国科学院大学;
【基金】：中国科学院青年创新促进会
【分类号】：TN249

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