基于SU-8光刻胶的微透镜及阵列的研究

发布时间：2018-03-02 06:20

本文关键词： 微透镜及其阵列 SU-8光刻胶光刻表面张力 Surface Evolver　出处：《中国科学技术大学》2015年硕士论文　论文类型：学位论文

【摘要】：随着微光机电系统(MOEMS)的迅猛发展,人们对于光学元件的微型化的需求日益增加。而透镜作为光学系统中非常重要的元件,透镜的微型化也成为研究热点。近年来,有很多科研机构和高等院校在进行针对微透镜研制的工作,提出了许多种微透镜制作方法。其中,光刻胶热熔法成为很多科研人员的研究重点。本文基于深紫外光刻技术,提出一种新的光刻胶微透镜制作方法,利用负性光刻胶在热熔时产生曲面的方法来制作微透镜。本文主要开展了以下工作： 1.调研了微透镜的制作方法,了解了微透镜制作方法的国内外研究现状和进展。研究SU-8胶光刻工艺,基于传统的光刻胶热熔法,提出一种新的利用光刻胶热熔制作微透镜的方法。对微透镜的成型机理进行了分析和讨论,从多个角度分析了各因素对微透镜的影响。对本文的微透镜制作方法进行优缺点的分析,分析了本方法制作的微透镜的一致性和均匀性。基于本文提出的光刻胶微透镜制作方法,研究了各种工艺参数对微透镜形貌的影响。针对不同的光刻胶厚度、微透镜宽度和后烘降温过程,进行了大量的实验。 2.为了获得表面形貌和光学特性,利用三种测量手段来测量微透镜的相关数据,分别是台阶仪测量、光学显微镜和扫描电子显微镜测量和光学测量装置,通过台阶仪和显微镜可以获得微透镜的曲面和形貌,通过光学测量装置可以获得微透镜的光学特性。基于以上相关实验数据,分析各工艺参数对微透镜形貌及其光学性能的影响。针对光刻胶微结构的宽度、光刻胶厚度、后烘降温过程对光刻胶微透镜的影响进行了讨论和分析。通过两种方法计算和测得了微透镜的焦距,对微透镜的光学特性进行了分析和评价。最后分析了本实验制作的微透镜的填充因子。通过以上数据和分析,我们得出本文制作的微透镜有以下优点：1.本文制作的微透镜具有超长的焦距,远远大于传统光刻胶热熔法制作的微透镜的焦距。2.本文的微透镜制作方法可靠性好,工艺宽容性好。3.本文制作的微透镜的填充因子很大,实验中的填充因子最大可达98.5%。 3.对微透镜的成型机理进行了分析,并用Surface Evolver进行了模拟仿真。模拟仿真结果较好地符合了实验结果,证明了微透镜的主要成型机理是利用热熔的光刻胶受表面张力影响而形成所需曲面。通过软件仿真模拟,验证了对于微透镜成型机理的分析和假设。
[Abstract]:With the rapid development of MOEMSs, the demand for the miniaturization of optical elements is increasing day by day. As a very important element in optical system, the miniaturization of lenses has become a hot topic in recent years. Many scientific research institutions and universities are working on the development of microlenses, and many kinds of microlens fabrication methods have been put forward. Among them, thermal melting of photoresist has become the research focus of many researchers. This paper is based on deep ultraviolet lithography. A new method of fabricating photoresist microlens is proposed. The method of producing surface of negative photoresist in hot melt is used to fabricate the microlens. The main work of this paper is as follows:. 1. The fabrication method of microlens is investigated, and the present situation and progress of the fabrication method of microlens at home and abroad are discussed. The process of SU-8 photoresist lithography is studied, which is based on the traditional hot melting method of photoresist. A new method of fabricating microlens by thermal melting of photoresist is presented. The forming mechanism of microlens is analyzed and discussed. The influence of various factors on the microlens is analyzed from several angles. The advantages and disadvantages of the fabrication method of the microlens in this paper are analyzed. The uniformity and uniformity of the microlens made by this method are analyzed. Based on the method proposed in this paper, the influence of various technological parameters on the morphology of the microlens is studied. A large number of experiments were carried out on the width of the microlens and the cooling process after drying. 2. In order to obtain surface morphology and optical properties, three methods of measurement are used to measure the relevant data of the microlens, namely, step meter measurement, optical microscope and scanning electron microscope measurement and optical measuring device. The surface and morphology of the microlens can be obtained by the step instrument and microscope, and the optical properties of the microlens can be obtained by the optical measuring device. The influence of various technological parameters on the morphology and optical properties of microlens was analyzed. The effect of post-drying process on the photoresist microlens was discussed and analyzed. The focal length of the microlens was calculated and measured by two methods. The optical properties of the microlens were analyzed and evaluated. Finally, the filling factor of the microlens was analyzed. We draw the conclusion that the microlens made in this paper has the following advantages: 1. The microlens made in this paper has an extremely long focal length, which is much larger than the focal length of the microlens made by traditional photolithography hot melt method. The filling factor of the microlens made in this paper is very large, and the maximum filling factor in the experiment is 98.55.3. 3. The forming mechanism of the microlens is analyzed and simulated by Surface Evolver. The simulation results are in good agreement with the experimental results. It is proved that the main forming mechanism of the microlens is to form the required surface by the influence of the surface tension on the hot melt photoresist, and the analysis and hypothesis of the forming mechanism of the microlens are verified by the software simulation.
【学位授予单位】：中国科学技术大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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