接触型局域SP光刻直写设备中的散热研究

发布时间：2018-03-02 07:42

本文关键词： 等离子体光刻金属-介质多层膜热分析仿生流道　出处：《电子科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：光刻技术在半导体工业中一直扮演核心技术的角色,但衍射极限的存在限制传统光学光刻在光刻分辨率上的提高。基于表面等离子体激元的近场光刻能够突破衍射极限并具有透射增强效应,使得光刻分辨率及成像质量得到明显提高。等离子体直写光刻作为表面等离子体光刻中的一种,能够实现任意图形的刻写且成本较低,值得研究开发。本文来源于国家重点实验室开放课题“接触型局域SP光刻直写头设计和扫描性能分析研究”,根据课题需求,必须对光刻直写设备中存在发热现象的物件进行相关散热研究。本文从传热学和流体方程相关理论出发,吸取国内外光刻设备散热经验,对光刻直写设备中光刻头的薄膜结构进行散热性能分析并对用于投影物镜等散热的循环水冷装置进行深入研究。本文对在自然风冷中处于工作状态的金属-介质多层膜及单层铬膜进行热分析,得到薄膜结构瞬态温度场分布规律及光照功率密度对薄膜温度场的影响关系,确定不需要采用其它制冷方式,并研究金属-介质多层膜散热特性中存在的尺寸效应。对用于投影物镜等散热的循环水冷装置进行总体设计,构建由制冷模块、加热水箱、泵、循环管路等组成及采用热电制冷方式的循环水冷系统。完成制冷模块的设计,深入研究分叉流道结构参数对流道流动及换热性能的影响,设计并优化仿生流道;对换热器流道结构进行对比选择,使用有限元分析软件对采用平行流道、蛇形流道、仿生流道的换热器分别进行流场-温度场耦合仿真分析计算,通过对比换热器出口处水温,选择制冷效果最优的仿生流道作为换热器流道结构,讨论材料及边界条件对制冷模块制冷效果的影响,优化换热器相关参数,达到较高热交换效率的目的。
[Abstract]:Lithography has always played a key role in the semiconductor industry. However, the diffraction limit limits the resolution of traditional optical lithography. The near-field lithography based on surface plasmon can break through the diffraction limit and have transmission enhancement effect. As one of the surface plasma photolithography, plasma direct writing lithography can realize the writing of arbitrary graphics and the cost is lower. This paper is derived from the open project of the State key Laboratory, "Design of contact Local SP Lithography Direct Writing head and Analysis of scanning performance", according to the requirements of the project. It is necessary to study the heat dissipation of objects in lithography direct writing equipment. Based on the theory of heat transfer and fluid equation, the heat dissipation experience of lithography equipment at home and abroad should be absorbed in this paper. The heat dissipation performance of the film structure of the lithography head in the lithography direct writing equipment is analyzed, and the circulating water cooling device used for projecting objective lens is studied in depth. In this paper, the metal-medium in the working state in the natural air cooling system is studied. Thermal analysis of multilayer and single-layer chromium film, The distribution of transient temperature field and the influence of illumination power density on the film temperature field are obtained, and it is determined that there is no need for other refrigeration methods. The size effect in the heat dissipation characteristics of metal-dielectric multilayer film is studied. The overall design of circulating water cooling device used for projecting objective lens is carried out, and the cooling module, heating water tank, pump, and so on are constructed. The design of the refrigeration module is completed, the influence of the structural parameters of the bifurcation channel on the flow and heat transfer performance of the channel is studied deeply, and the bionic runner is designed and optimized. The flow field and temperature field of the heat exchanger with parallel channel, snake channel and bionic channel were analyzed and calculated by using finite element analysis software, and the water temperature at the outlet of the heat exchanger was compared. The bionic channel with optimal refrigeration effect is selected as the flow channel structure of heat exchanger. The influence of material and boundary conditions on the refrigeration effect of refrigeration module is discussed. The relative parameters of heat exchanger are optimized to achieve the purpose of higher heat exchange efficiency.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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