基于激光干涉的三自由度测量系统的理论分析

发布时间：2018-03-08 04:35

本文选题：激光干涉　切入点：三自由度　出处：《武汉大学学报(工学版)》2016年01期 　论文类型：期刊论文

【摘要】：为了克服激光沿原光路返回产生激光回馈效应的影响,提出了一种以组合三反射镜为目标载体的三自由度测量方法,即三平面镜组合方法.它不同于平面镜或角隅棱镜作为目标镜的方法,既能使反射光线与原光线错开一定距离,保证反射光不会沿原光路返回,又能使反射光线保留目标测量对象的偏转信息.在实际测量过程中,一方面由于测量位移范围较小,测量光束与参考光束在测量过程中错开很小,不会影响干涉条纹的产生.另一方面考虑工作台偏转角度一般很小,对干涉条纹形状的影响不会造成对干涉条纹计数的破坏.实验应用结果表明,该方法适用于运动位移与偏转角度的三自由度同步测量.
[Abstract]:In order to overcome the effect of laser feedback on the return of the laser along the original optical path, a three-degree-of-freedom measurement method with a combined three-mirror as the target carrier is proposed. It is different from the method of planar mirror or corner prism as the object mirror. It can not only stagger the reflected light from the original light, but also ensure that the reflected light will not return along the original light path. In the actual measurement process, because of the small range of measurement displacement, the measurement beam and the reference beam are staggered very small in the process of measurement. On the other hand, considering that the deflection angle of the worktable is usually very small, the influence on the shape of interference fringes will not cause damage to the number of interference fringes. The experimental results show that, This method is suitable for synchronous measurement of motion displacement and deflection angle with three degrees of freedom.
【作者单位】：湖北工业大学机械工程学院;湖北工业大学湖北省现代制造质量工程重点实验室;
【分类号】：TN249

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